Elektromehaaniline mikrosüsteem (Estonian Wikipedia)

Analysis of information sources in references of the Wikipedia article "Elektromehaaniline mikrosüsteem" in Estonian language version.

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T. Polster, M. Hoffmann (2009). "Aluminium nitride based 3D, piezoelectric, tactile sensors". Proc. Chem. 1: 144–7. DOI:10.1016/j.proche.2009.07.036.
M. Birkholz, K.-E. Ehwald, P. Kulse, J. Drews, M. Fröhlich, U. Haak, M. Kaynak, E. Matthus, K. Schulz, D. Wolansky (2011). "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices". Adv. Func. Mat. 21: 1652–6. DOI:10.1002/adfm.201002062.{{cite journal}}: CS1 hooldus: mitu nime: autorite loend (link)
Williams, K.R.; Muller, R.S. (1996). "Etch rates for micromachining processing". Journal of Microelectromechanical Systems. 5 (4): 256. DOI:10.1109/84.546406.
Kovacs, G.T.A.; Maluf, N.I.; Petersen, K.E. (1998). "Bulk micromachining of silicon". Proceedings of the IEEE. 86 (8): 1536. DOI:10.1109/5.704259.
Chang, Floy I. (1995). "Gas-phase silicon micromachining with xenon difluoride". 2641: 117. DOI:10.1117/12.220933. {{cite journal}}: viitemall journal nõuab parameetrit |journal= (juhend)
Brazzle, J.D.; Dokmeci, M.R.; Mastrangelo, C.H. (2004). "Modeling and characterization of sacrificial polysilicon etching using vapor-phase xenon difluoride": 737. DOI:10.1109/MEMS.2004.1290690. {{cite journal}}: viitemall journal nõuab parameetrit |journal= (juhend)

Electromechanical monolithic resonator, US patent 3614677, Filed April 29, 1966; Issued October 1971

M. Birkholz, K.-E. Ehwald, P. Kulse, J. Drews, M. Fröhlich, U. Haak, M. Kaynak, E. Matthus, K. Schulz, D. Wolansky (2011). "Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices". Adv. Func. Mat. 21: 1652–6. DOI:10.1002/adfm.201002062.{{cite journal}}: CS1 hooldus: mitu nime: autorite loend (link)