草酰氟 (Chinese Wikipedia)

Analysis of information sources in references of the Wikipedia article "草酰氟" in Chinese language version.

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doi.org

  • Simon Karecki; Ritwik Chatterjee; Laura Pruette; Rafael Reif; Terry Sparks; Laurie Beu; Victor Vartanian & Konstantin Novoselovc. Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool. J. Electrochem. Soc. 2001, 148 (3): G141–G149. doi:10.1149/1.1348263. 

freepatentsonline.com

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