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Damascene-Prozess (German Wikipedia)

Analysis of information sources in references of the Wikipedia article "Damascene-Prozess" in German language version.

refsWebsite
Global rank German rank
1zdb-katalog.de
123rd place
6th place

zdb-katalog.de

  • S. P. Murarka, S. W. Hymes: Copper metallization for ULSI and beyond. In: Critical Reviews in Solid State and Materials Sciences. Band 20, Nr. 2, 1995, ISSN 1040-8436, S. 87–124.