Johnsen-Rahbek-Effekt (German Wikipedia)

Analysis of information sources in references of the Wikipedia article "Johnsen-Rahbek-Effekt" in German language version.

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acm.org

portal.acm.org

  • C. J. Fitch: Development of the Electrostatic Clutch. In: IBM Journal. Band 1, Nr. 1, 1957, S. 49–56 (portal.acm.org [PDF]).

denstoredanske.dk

doi.org

  • Shu Qin, Allen McTeer: Wafer dependence of Johnsen–Rahbek type electrostatic chuck for semiconductor processes. In: Journal of Applied Physics. Band 102, Nr. 6, 2007, S. 064901, doi:10.1063/1.2778633.
  • Gyu Il Shim, Hideo Sugai: Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing. In: Plasma and Fusion Research. Band 3, Nr. 0, 2008, S. 051, doi:10.1585/pfr.3.051 (jstage.jst.go.jp [PDF; 401 kB]).
  • Albino Antinori: Über den Ursprung des Johnsen-Rahbek-Effekts. In: Zeitschrift für Physik A. Band 34, Nr. 1, 1925, S. 705–714, doi:10.1007/BF01328517.
  • R. Atkinson: A simple theory of the Johnsen-Rahbek effect. In: Journal of Physics D: Applied Physics. Band 2, Nr. 3, 1969, S. 325–332, doi:10.1088/0022-3727/2/3/303.

espacenet.com

worldwide.espacenet.com

  • Patent US1533757: Apparatus for changing electrical variations to mechanical. Angemeldet am 10. März 1919, veröffentlicht am 14. April 1925, Erfinder: K. Rahbek, F. A. Johnsen (Namensnachweis der Erfinder).

jst.go.jp

jstage.jst.go.jp

  • Gyu Il Shim, Hideo Sugai: Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing. In: Plasma and Fusion Research. Band 3, Nr. 0, 2008, S. 051, doi:10.1585/pfr.3.051 (jstage.jst.go.jp [PDF; 401 kB]).