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Axelrad, V.; et al. (2010). Rieger, Michael L; Thiele, Joerg (eds.). "16nm with 193nm immersion lithography and double exposure". Proc. SPIE. Design for Manufacturability through Design-Process Integration IV. 7641: 764109. Bibcode:2010SPIE.7641E..09A. doi:10.1117/12.846677. S2CID56158128.
Noh, M-S.; et al. (2010). Dusa, Mircea V; Conley, Will (eds.). "Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows". Proc. SPIE. Optical Microlithography XXIII. 7640: 76400S. Bibcode:2010SPIE.7640E..0SN. doi:10.1117/12.848194. S2CID120545900.
Axelrad, V.; et al. (2010). Rieger, Michael L; Thiele, Joerg (eds.). "16nm with 193nm immersion lithography and double exposure". Proc. SPIE. Design for Manufacturability through Design-Process Integration IV. 7641: 764109. Bibcode:2010SPIE.7641E..09A. doi:10.1117/12.846677. S2CID56158128.
Noh, M-S.; et al. (2010). Dusa, Mircea V; Conley, Will (eds.). "Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows". Proc. SPIE. Optical Microlithography XXIII. 7640: 76400S. Bibcode:2010SPIE.7640E..0SN. doi:10.1117/12.848194. S2CID120545900.