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Yet, Siew Ing (2004). "Investigation of UFO defect on DUV CAR and BARC process". In Silver, Richard M (ed.). Metrology, Inspection, and Process Control for Microlithography XVIII. Vol. 5375. SPIE. pp. 940–948. Bibcode:2004SPIE.5375..940Y. doi:10.1117/12.535034.