Chemical-mechanical polishing (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Chemical-mechanical polishing" in English language version.

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doi.org

doi.org

Mahadevaiyer Krishnan, Jakub W. Nalaskowsk, and Lee M. Cook, "Chemical Mechanical Planarization: Slurry Chemistry, Materials, and Mechanisms" Chem. Rev., 2010, vol. 110, pp 178–204. doi:10.1021/cr900170z
Oliver, Michael R., ed. (2004). "Chemical-Mechanical Planarization of Semiconductor Materials". Springer Series in Materials Science. doi:10.1007/978-3-662-06234-0. ISSN 0933-033X.

dx.doi.org

Oliver, Michael R., ed. (2004). "Chemical-Mechanical Planarization of Semiconductor Materials". Springer Series in Materials Science. doi:10.1007/978-3-662-06234-0. ISSN 0933-033X.

worldcat.org

search.worldcat.org

Oliver, Michael R., ed. (2004). "Chemical-Mechanical Planarization of Semiconductor Materials". Springer Series in Materials Science. doi:10.1007/978-3-662-06234-0. ISSN 0933-033X.