Owusu-Boahen, Kwame; Han, Carl; Hsueh, Ching; Kim, Chulwoo; Vijayakumar, Arun; Devender, Fnu; Moreau, David (2021). "E-Beam detection of over-etch in semiconductor processing and how over-etch level is related to defect detection parameters". In Adan, Ofer; Robinson, John C. (eds.). Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV. p.18. doi:10.1117/12.2584652. ISBN978-1-5106-4055-9.