Elastic recoil detection (English Wikipedia)

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  • Assmann, W.; Huber, H.; Steinhausen, Ch.; Dobler, M.; Glückler, H.; Weidinger, A. (1 May 1994). "Elastic recoil detection analysis with heavy ions". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 89 (1–4): 131–139. Bibcode:1994NIMPB..89..131A. doi:10.1016/0168-583X(94)95159-4.
  • Brijs, B.; Deleu, J.; Conard, T.; De Witte, H.; Vandervorst, W.; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000). "Characterization of ultra thin oxynitrides: A general approach". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 161–163: 429–434. Bibcode:2000NIMPB.161..429B. CiteSeerX 10.1.1.521.6748. doi:10.1016/S0168-583X(99)00674-6.
  • Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Fresenius' Journal of Analytical Chemistry. 353 (3–4): 311–315. doi:10.1007/BF00322058. PMID 15048488. S2CID 197595083.
  • L’Ecuyer, J.; Brassard, C.; Cardinal, C.; Chabbal, J.; Deschênes, L.; Labrie, J.P.; Terreault, B.; Martel, J.G.; St. Jacques, R. (1976). "An accurate and sensitive method for the determination of the depth distribution of light elements in heavy materials". Journal of Applied Physics. 47 (1): 381. Bibcode:1976JAP....47..381L. doi:10.1063/1.322288.
  • Tomita, Mitsuhiro; Akutsu, Haruko; Oshima, Yasunori; Sato, Nobutaka; Mure, Shoichi; Fukuyama, Hirofumi; Ichihara, Chikara (2010). "Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 28 (3): 554. Bibcode:2010JVSTB..28..554T. doi:10.1116/1.3425636.
  • Elliman, R.G.; Timmers, H.; Palmer, G.R.; Ophel, T.R. (1998). "Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 136–138 (1–4): 649–653. Bibcode:1998NIMPB.136..649E. doi:10.1016/S0168-583X(97)00879-3.
  • Avasthi, DK (1997). "Role of swift heavy ions in materials characterization and modification". Vacuum. 48 (12): 1011–1015. Bibcode:1997Vacuu..48.1011A. doi:10.1016/S0042-207X(97)00114-0.
  • Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1 October 1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Analytical and Bioanalytical Chemistry. 353 (3–4): 311–315. doi:10.1007/s0021653530311. PMID 15048488. S2CID 43574325.
  • Yu, R.; Gustafsson, T. (December 1986). "Determination of the abundance of adsorbed light atoms on a surface using recoil scattering". Surface Science. 177 (2): L987 – L993. Bibcode:1986SurSc.177L.987Y. doi:10.1016/0039-6028(86)90133-0.
  • Seiberling, L.E.; Cooper, B.H.; Griffith, J.E.; Mendenhall, M.H.; Tombrello, T.A. (1982). "The sputtering of insulating materials by fast heavy ions". Nuclear Instruments and Methods in Physics Research. 198 (1): 17–25. Bibcode:1982NIMPR.198...17S. doi:10.1016/0167-5087(82)90045-X.
  • Stoquert, J.P.; Guillaume, G.; Hage-Ah, M.; Grob, J.J.; Gamer, C.; Siffert, P. (1989). "Determination of concentration profiles by elastic recoil detection with a ΔE−E gas telescope and high energy incident heavy ions". Nuclear Instruments and Methods in Physics Research Section B. 44 (2): 184–194. Bibcode:1989NIMPB..44..184S. doi:10.1016/0168-583X(89)90426-6.
  • Jeynes, Chris; Webb, Roger P.; Lohstroh, Annika (January 2011). "Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation". Reviews of Accelerator Science and Technology. 4 (1): 41–82. Bibcode:2011rast.book...41J. doi:10.1142/S1793626811000483.
  • Doyle, B.L.; Peercy, P.S.; Gray, T.J.; Cocke, C.L.; Justiniano, E. (1983). "Surface Spectroscopy Using High Energy Heavy Ions". IEEE Transactions on Nuclear Science. 30 (NS-30): 1252. Bibcode:1983ITNS...30.1252D. doi:10.1109/TNS.1983.4332502. S2CID 26944869.
  • Terreault, B.; Martel, J.G.; St-Jacques, R.G.; L'Ecuyer, J. (January 1977). "Depth profiling of light elements in materials with high-energy ion beams". Journal of Vacuum Science and Technology. 14 (1): 492–500. Bibcode:1977JVST...14..492T. doi:10.1116/1.569240.
  • Szilágyi, E.; Pászti, F.; Quillet, V.; Abel, F. (1994). "Optimization of the depth resolution in ERDA of H using 12C ions". Nuclear Instruments and Methods in Physics Research Section B. 85 (1–4): 63–67. Bibcode:1994NIMPB..85...63S. doi:10.1016/0168-583X(94)95787-8.
  • Mallepell, M.; Döbeli, M.; Suter, M. (2009). "Annular gas ionization detector for low energy heavy ion backscattering spectrometry". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 267 (7): 1193–1198. Bibcode:2009NIMPB.267.1193M. doi:10.1016/j.nimb.2009.01.031.
  • For a more detailed description of ionization detector design, see Assmann, W.; Hartung, P.; Huber, H.; Staat, P.; Steinhausen, C.; Steffens, H. (1994). "Elastic recoil detection analysis with heavy ions". Nuclear Instruments and Methods in Physics Research Section B. 85 (1–4): 726–731. Bibcode:1994NIMPB..85..726A. doi:10.1016/0168-583X(94)95911-0.
  • Szilágyi, E.; Pászti, F.; Amsel, G. (1995). "Theoretical approximations for depth resolution calculations in IBA methods". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 100 (1): 103–121. Bibcode:1995NIMPB.100..103S. doi:10.1016/0168-583X(95)00186-7.
  • Szilagyi, E.; Paszti, F.; Amsel, G. (1995). "Theoretical approach of depth resolution in IBA geometry". Journal of the American Chemical Society. 100 (1): 103–121. Bibcode:1995NIMPB.100..103S. doi:10.1016/0168-583X(95)00186-7.
  • Tschalär, C.; Maccabee, H. (1970). "Energy-Straggling Measurements of Heavy Charged Particles in Thick Absorbers". Physical Review B. 1 (7): 2863–2869. Bibcode:1970PhRvB...1.2863T. doi:10.1103/PhysRevB.1.2863.
  • Bohr, N. (1913). "II". Philosophical Magazine. Series 6. 25 (145): 10–31. doi:10.1080/14786440108634305.
  • Schmaus, D.; L'hoir, A. (1984). "Experimental study of the multiple scattering lateral spread of MeV protons transmitted through polyester films". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2 (1–3): 156–158. Bibcode:1984NIMPB...2..156S. doi:10.1016/0168-583X(84)90178-2.
  • Payne, M. (1969). "Energy Straggling of Heavy Charged Particles in Thick Absorbers". Physical Review. 185 (2): 611–623. Bibcode:1969PhRv..185..611P. doi:10.1103/PhysRev.185.611.
  • Tschalär, C. (1968). "Straggling distributions of large energy losses". Nuclear Instruments and Methods. 61 (2): 141–156. Bibcode:1968NucIM..61..141T. doi:10.1016/0029-554X(68)90535-1.
  • Scott, William (1963). "The Theory of Small-Angle Multiple Scattering of Fast Charged Particles". Reviews of Modern Physics. 35 (2): 231–313. Bibcode:1963RvMP...35..231S. doi:10.1103/RevModPhys.35.231.
  • Sigmund, P.; Heinemeier, J.; Besenbacher, F.; Hvelplund, P.; Knudsen, H. (1978). "Small-angle multiple scattering of ions in the screened-coulomb region. III. Combined angular and lateral spread". Nuclear Instruments and Methods. 150 (2): 221–231. Bibcode:1978NucIM.150..221S. doi:10.1016/0029-554X(78)90370-1.
  • Williams, E. J. (1 October 1929). "The Straggling of Formula-Particles". Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences. 125 (798): 420–445. Bibcode:1929RSPSA.125..420W. doi:10.1098/rspa.1929.0177.
  • Williams, E. (1940). "Multiple Scattering of Fast Electrons and Alpha-Particles, and "Curvature" of Cloud Tracks Due to Scattering". Physical Review. 58 (4): 292–306. Bibcode:1940PhRv...58..292W. doi:10.1103/PhysRev.58.292.
  • Williams, E. (1945). "Application of Ordinary Space-Time Concepts in Collision Problems and Relation of Classical Theory to Born's Approximation". Reviews of Modern Physics. 17 (2–3): 217–226. Bibcode:1945RvMP...17..217W. doi:10.1103/RevModPhys.17.217.
  • Goudsmit, S.; Saunderson, J. (1940). "Multiple Scattering of Electrons. II". Physical Review. 58 (1): 36–42. Bibcode:1940PhRv...58...36G. doi:10.1103/PhysRev.58.36.
  • Meyer, L. (1971). "Plural and multiple scattering of low-energy heavy particles in solids". Physica Status Solidi B. 44 (1): 253–268. Bibcode:1971PSSBR..44..253M. doi:10.1002/pssb.2220440127.
  • "Small-angle multiple scattering of ions in the screened coulomb region". Journal of the ICRU. 12 (1): 239–253. 2005. doi:10.1093/jicru/ndi014.
  • Composto, Russell J.; Walters, Russel M.; Genzer, Jan (2002). "Application of ion scattering techniques to characterize polymer surfaces and interfaces". Materials Science and Engineering: R: Reports. 38 (3–4): 107–180. doi:10.1016/S0927-796X(02)00009-8.
  • Green, Peter F.; Russell, Thomas P. (1991). "Segregation of low molecular weight symmetric diblock copolymers at the interface of high molecular weight homopolymers". Macromolecules. 24 (10): 2931–2935. Bibcode:1991MaMol..24.2931G. doi:10.1021/ma00010a045.
  • Gusinskii, G M; Kudryavtsev, I V; Kudoyarova, V K; Naidenov, V O; Rassadin, L A (1 July 1992). "A method for investigation of light-element distribution in the surface layers of semiconductors and dielectrics". Semiconductor Science and Technology. 7 (7): 881–887. Bibcode:1992SeScT...7..881G. doi:10.1088/0268-1242/7/7/002. S2CID 250777983.

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ui.adsabs.harvard.edu

  • Assmann, W.; Huber, H.; Steinhausen, Ch.; Dobler, M.; Glückler, H.; Weidinger, A. (1 May 1994). "Elastic recoil detection analysis with heavy ions". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 89 (1–4): 131–139. Bibcode:1994NIMPB..89..131A. doi:10.1016/0168-583X(94)95159-4.
  • Brijs, B.; Deleu, J.; Conard, T.; De Witte, H.; Vandervorst, W.; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000). "Characterization of ultra thin oxynitrides: A general approach". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 161–163: 429–434. Bibcode:2000NIMPB.161..429B. CiteSeerX 10.1.1.521.6748. doi:10.1016/S0168-583X(99)00674-6.
  • L’Ecuyer, J.; Brassard, C.; Cardinal, C.; Chabbal, J.; Deschênes, L.; Labrie, J.P.; Terreault, B.; Martel, J.G.; St. Jacques, R. (1976). "An accurate and sensitive method for the determination of the depth distribution of light elements in heavy materials". Journal of Applied Physics. 47 (1): 381. Bibcode:1976JAP....47..381L. doi:10.1063/1.322288.
  • Tomita, Mitsuhiro; Akutsu, Haruko; Oshima, Yasunori; Sato, Nobutaka; Mure, Shoichi; Fukuyama, Hirofumi; Ichihara, Chikara (2010). "Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 28 (3): 554. Bibcode:2010JVSTB..28..554T. doi:10.1116/1.3425636.
  • Elliman, R.G.; Timmers, H.; Palmer, G.R.; Ophel, T.R. (1998). "Limitations to depth resolution in high-energy, heavy-ion elastic recoil detection analysis". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 136–138 (1–4): 649–653. Bibcode:1998NIMPB.136..649E. doi:10.1016/S0168-583X(97)00879-3.
  • Avasthi, DK (1997). "Role of swift heavy ions in materials characterization and modification". Vacuum. 48 (12): 1011–1015. Bibcode:1997Vacuu..48.1011A. doi:10.1016/S0042-207X(97)00114-0.
  • Yu, R.; Gustafsson, T. (December 1986). "Determination of the abundance of adsorbed light atoms on a surface using recoil scattering". Surface Science. 177 (2): L987 – L993. Bibcode:1986SurSc.177L.987Y. doi:10.1016/0039-6028(86)90133-0.
  • Seiberling, L.E.; Cooper, B.H.; Griffith, J.E.; Mendenhall, M.H.; Tombrello, T.A. (1982). "The sputtering of insulating materials by fast heavy ions". Nuclear Instruments and Methods in Physics Research. 198 (1): 17–25. Bibcode:1982NIMPR.198...17S. doi:10.1016/0167-5087(82)90045-X.
  • Stoquert, J.P.; Guillaume, G.; Hage-Ah, M.; Grob, J.J.; Gamer, C.; Siffert, P. (1989). "Determination of concentration profiles by elastic recoil detection with a ΔE−E gas telescope and high energy incident heavy ions". Nuclear Instruments and Methods in Physics Research Section B. 44 (2): 184–194. Bibcode:1989NIMPB..44..184S. doi:10.1016/0168-583X(89)90426-6.
  • Jeynes, Chris; Webb, Roger P.; Lohstroh, Annika (January 2011). "Ion Beam Analysis: A Century of Exploiting the Electronic and Nuclear Structure of the Atom for Materials Characterisation". Reviews of Accelerator Science and Technology. 4 (1): 41–82. Bibcode:2011rast.book...41J. doi:10.1142/S1793626811000483.
  • Doyle, B.L.; Peercy, P.S.; Gray, T.J.; Cocke, C.L.; Justiniano, E. (1983). "Surface Spectroscopy Using High Energy Heavy Ions". IEEE Transactions on Nuclear Science. 30 (NS-30): 1252. Bibcode:1983ITNS...30.1252D. doi:10.1109/TNS.1983.4332502. S2CID 26944869.
  • Terreault, B.; Martel, J.G.; St-Jacques, R.G.; L'Ecuyer, J. (January 1977). "Depth profiling of light elements in materials with high-energy ion beams". Journal of Vacuum Science and Technology. 14 (1): 492–500. Bibcode:1977JVST...14..492T. doi:10.1116/1.569240.
  • Szilágyi, E.; Pászti, F.; Quillet, V.; Abel, F. (1994). "Optimization of the depth resolution in ERDA of H using 12C ions". Nuclear Instruments and Methods in Physics Research Section B. 85 (1–4): 63–67. Bibcode:1994NIMPB..85...63S. doi:10.1016/0168-583X(94)95787-8.
  • Mallepell, M.; Döbeli, M.; Suter, M. (2009). "Annular gas ionization detector for low energy heavy ion backscattering spectrometry". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 267 (7): 1193–1198. Bibcode:2009NIMPB.267.1193M. doi:10.1016/j.nimb.2009.01.031.
  • For a more detailed description of ionization detector design, see Assmann, W.; Hartung, P.; Huber, H.; Staat, P.; Steinhausen, C.; Steffens, H. (1994). "Elastic recoil detection analysis with heavy ions". Nuclear Instruments and Methods in Physics Research Section B. 85 (1–4): 726–731. Bibcode:1994NIMPB..85..726A. doi:10.1016/0168-583X(94)95911-0.
  • Szilágyi, E.; Pászti, F.; Amsel, G. (1995). "Theoretical approximations for depth resolution calculations in IBA methods". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 100 (1): 103–121. Bibcode:1995NIMPB.100..103S. doi:10.1016/0168-583X(95)00186-7.
  • Szilagyi, E.; Paszti, F.; Amsel, G. (1995). "Theoretical approach of depth resolution in IBA geometry". Journal of the American Chemical Society. 100 (1): 103–121. Bibcode:1995NIMPB.100..103S. doi:10.1016/0168-583X(95)00186-7.
  • Tschalär, C.; Maccabee, H. (1970). "Energy-Straggling Measurements of Heavy Charged Particles in Thick Absorbers". Physical Review B. 1 (7): 2863–2869. Bibcode:1970PhRvB...1.2863T. doi:10.1103/PhysRevB.1.2863.
  • Schmaus, D.; L'hoir, A. (1984). "Experimental study of the multiple scattering lateral spread of MeV protons transmitted through polyester films". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 2 (1–3): 156–158. Bibcode:1984NIMPB...2..156S. doi:10.1016/0168-583X(84)90178-2.
  • Payne, M. (1969). "Energy Straggling of Heavy Charged Particles in Thick Absorbers". Physical Review. 185 (2): 611–623. Bibcode:1969PhRv..185..611P. doi:10.1103/PhysRev.185.611.
  • Tschalär, C. (1968). "Straggling distributions of large energy losses". Nuclear Instruments and Methods. 61 (2): 141–156. Bibcode:1968NucIM..61..141T. doi:10.1016/0029-554X(68)90535-1.
  • Scott, William (1963). "The Theory of Small-Angle Multiple Scattering of Fast Charged Particles". Reviews of Modern Physics. 35 (2): 231–313. Bibcode:1963RvMP...35..231S. doi:10.1103/RevModPhys.35.231.
  • Sigmund, P.; Heinemeier, J.; Besenbacher, F.; Hvelplund, P.; Knudsen, H. (1978). "Small-angle multiple scattering of ions in the screened-coulomb region. III. Combined angular and lateral spread". Nuclear Instruments and Methods. 150 (2): 221–231. Bibcode:1978NucIM.150..221S. doi:10.1016/0029-554X(78)90370-1.
  • Williams, E. J. (1 October 1929). "The Straggling of Formula-Particles". Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences. 125 (798): 420–445. Bibcode:1929RSPSA.125..420W. doi:10.1098/rspa.1929.0177.
  • Williams, E. (1940). "Multiple Scattering of Fast Electrons and Alpha-Particles, and "Curvature" of Cloud Tracks Due to Scattering". Physical Review. 58 (4): 292–306. Bibcode:1940PhRv...58..292W. doi:10.1103/PhysRev.58.292.
  • Williams, E. (1945). "Application of Ordinary Space-Time Concepts in Collision Problems and Relation of Classical Theory to Born's Approximation". Reviews of Modern Physics. 17 (2–3): 217–226. Bibcode:1945RvMP...17..217W. doi:10.1103/RevModPhys.17.217.
  • Goudsmit, S.; Saunderson, J. (1940). "Multiple Scattering of Electrons. II". Physical Review. 58 (1): 36–42. Bibcode:1940PhRv...58...36G. doi:10.1103/PhysRev.58.36.
  • Meyer, L. (1971). "Plural and multiple scattering of low-energy heavy particles in solids". Physica Status Solidi B. 44 (1): 253–268. Bibcode:1971PSSBR..44..253M. doi:10.1002/pssb.2220440127.
  • Green, Peter F.; Russell, Thomas P. (1991). "Segregation of low molecular weight symmetric diblock copolymers at the interface of high molecular weight homopolymers". Macromolecules. 24 (10): 2931–2935. Bibcode:1991MaMol..24.2931G. doi:10.1021/ma00010a045.
  • Gusinskii, G M; Kudryavtsev, I V; Kudoyarova, V K; Naidenov, V O; Rassadin, L A (1 July 1992). "A method for investigation of light-element distribution in the surface layers of semiconductors and dielectrics". Semiconductor Science and Technology. 7 (7): 881–887. Bibcode:1992SeScT...7..881G. doi:10.1088/0268-1242/7/7/002. S2CID 250777983.

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  • Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Fresenius' Journal of Analytical Chemistry. 353 (3–4): 311–315. doi:10.1007/BF00322058. PMID 15048488. S2CID 197595083.
  • Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1 October 1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Analytical and Bioanalytical Chemistry. 353 (3–4): 311–315. doi:10.1007/s0021653530311. PMID 15048488. S2CID 43574325.

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citeseerx.ist.psu.edu

  • Brijs, B.; Deleu, J.; Conard, T.; De Witte, H.; Vandervorst, W.; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000). "Characterization of ultra thin oxynitrides: A general approach". Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 161–163: 429–434. Bibcode:2000NIMPB.161..429B. CiteSeerX 10.1.1.521.6748. doi:10.1016/S0168-583X(99)00674-6.

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api.semanticscholar.org

  • Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Fresenius' Journal of Analytical Chemistry. 353 (3–4): 311–315. doi:10.1007/BF00322058. PMID 15048488. S2CID 197595083.
  • Dollinger, G.; Bergmaier, A.; Faestermann, T.; Frey, C. M. (1 October 1995). "High resolution depth profile analysis by elastic recoil detection with heavy ions". Analytical and Bioanalytical Chemistry. 353 (3–4): 311–315. doi:10.1007/s0021653530311. PMID 15048488. S2CID 43574325.
  • Doyle, B.L.; Peercy, P.S.; Gray, T.J.; Cocke, C.L.; Justiniano, E. (1983). "Surface Spectroscopy Using High Energy Heavy Ions". IEEE Transactions on Nuclear Science. 30 (NS-30): 1252. Bibcode:1983ITNS...30.1252D. doi:10.1109/TNS.1983.4332502. S2CID 26944869.
  • Gusinskii, G M; Kudryavtsev, I V; Kudoyarova, V K; Naidenov, V O; Rassadin, L A (1 July 1992). "A method for investigation of light-element distribution in the surface layers of semiconductors and dielectrics". Semiconductor Science and Technology. 7 (7): 881–887. Bibcode:1992SeScT...7..881G. doi:10.1088/0268-1242/7/7/002. S2CID 250777983.

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