Etching (microfabrication) (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Etching (microfabrication)" in English language version.

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archive.org

Walker, Perrin; William H. Tarn (1991). CRC Handbook of Metal Etchants. CRC-Press. pp. 287–291. ISBN 978-0-8493-3623-2.

doi.org

Finne, R.M.; Klein, D.L. (1967). "A Water-Amine-Complexing Agent System for Etching Silicon". Journal of the Electrochemical Society. 114 (9): 965–70. Bibcode:1967JElS..114..965F. doi:10.1149/1.2426793.
Shikida, M.; Sato, K.; Tokoro, K.; Uchikawa, D. (2000). "Surface morphology of anisotropically etched single-crystal silicon". Journal of Micromechanics and Microengineering. 10 (4): 522. Bibcode:2000JMiMi..10..522S. doi:10.1088/0960-1317/10/4/306. S2CID 250804151.

harvard.edu

ui.adsabs.harvard.edu

Finne, R.M.; Klein, D.L. (1967). "A Water-Amine-Complexing Agent System for Etching Silicon". Journal of the Electrochemical Society. 114 (9): 965–70. Bibcode:1967JElS..114..965F. doi:10.1149/1.2426793.
Shikida, M.; Sato, K.; Tokoro, K.; Uchikawa, D. (2000). "Surface morphology of anisotropically etched single-crystal silicon". Journal of Micromechanics and Microengineering. 10 (4): 522. Bibcode:2000JMiMi..10..522S. doi:10.1088/0960-1317/10/4/306. S2CID 250804151.

semanticscholar.org

api.semanticscholar.org

Shikida, M.; Sato, K.; Tokoro, K.; Uchikawa, D. (2000). "Surface morphology of anisotropically etched single-crystal silicon". Journal of Micromechanics and Microengineering. 10 (4): 522. Bibcode:2000JMiMi..10..522S. doi:10.1088/0960-1317/10/4/306. S2CID 250804151.

worldcat.org

worldcat.org

Shubham, Kumar (2021). Integrated circuit fabrication. Ankaj Gupta. Abingdon, Oxon. ISBN 978-1-000-39644-7. OCLC 1246513110.{{cite book}}: CS1 maint: location missing publisher (link)

search.worldcat.org

Shubham, Kumar (2021). Integrated circuit fabrication. Ankaj Gupta. Abingdon, Oxon. ISBN 978-1-000-39644-7. OCLC 1246513110.{{cite book}}: CS1 maint: location missing publisher (link)