FOUP (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "FOUP" in English language version.

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books.google.com

Yoshio Nishi; Robert Doering (9 July 2007). Handbook of Semiconductor Manufacturing Technology, Second Edition. CRC Press. pp. 33–. ISBN 978-1-4200-1766-3.
Mikhail Baklanov; Paul S. Ho; Ehrenfried Zschech (17 February 2012). Advanced Interconnects for ULSI Technology. John Wiley & Sons. pp. 291–. ISBN 978-1-119-96686-9.
Lars Mönch; John W. Fowler; Scott Mason (12 September 2012). Production Planning and Control for Semiconductor Wafer Fabrication Facilities: Modeling, Analysis, and Systems. Springer Science & Business Media. pp. 144–. ISBN 978-1-4614-4471-8.

Lin, Tee; Zargar, Omid Ali; Lee, Tzu-Chieh; Sabusap, Dexter Lyndon; Li, Jian-Jie; Hu, Shih-Cheng; Khodadadi, Jay M.; Jamshideasli, Dourna; Leggett, Graham (2021-11-01). "Flow analysis of a front opening unified pod (FOUP) subjected to different fan filter unit (FFU) coverage area in mini-environment". International Journal of Thermofluids. 12: 100124. doi:10.1016/j.ijft.2021.100124. ISSN 2666-2027.

Lin, Tee; Zargar, Omid Ali; Lee, Tzu-Chieh; Sabusap, Dexter Lyndon; Li, Jian-Jie; Hu, Shih-Cheng; Khodadadi, Jay M.; Jamshideasli, Dourna; Leggett, Graham (2021-11-01). "Flow analysis of a front opening unified pod (FOUP) subjected to different fan filter unit (FFU) coverage area in mini-environment". International Journal of Thermofluids. 12: 100124. doi:10.1016/j.ijft.2021.100124. ISSN 2666-2027.