Hoffmann, J.; et al. (2009). Bosse, Harald; Bodermann, Bernd; Silver, Richard M (eds.). "Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas". Proc. SPIE. Modeling Aspects in Optical Metrology II. 7390: 73900J. arXiv:0907.3570. Bibcode:2009SPIE.7390E..0JH. doi:10.1117/12.828036. S2CID54741011.
Potzick, J.; et al. (2008). Kawahira, Hiroichi; Zurbrick, Larry S (eds.). "International photomask linewidth comparison by NIST and PTB". Proc. SPIE. Photomask Technology 2008. 7122: 71222P. Bibcode:2008SPIE.7122E..2PP. doi:10.1117/12.801435. S2CID109487376.
Hoffmann, J.; et al. (2009). Bosse, Harald; Bodermann, Bernd; Silver, Richard M (eds.). "Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas". Proc. SPIE. Modeling Aspects in Optical Metrology II. 7390: 73900J. arXiv:0907.3570. Bibcode:2009SPIE.7390E..0JH. doi:10.1117/12.828036. S2CID54741011.
Potzick, J.; et al. (2008). Kawahira, Hiroichi; Zurbrick, Larry S (eds.). "International photomask linewidth comparison by NIST and PTB". Proc. SPIE. Photomask Technology 2008. 7122: 71222P. Bibcode:2008SPIE.7122E..2PP. doi:10.1117/12.801435. S2CID109487376.
Hoffmann, J.; et al. (2009). Bosse, Harald; Bodermann, Bernd; Silver, Richard M (eds.). "Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas". Proc. SPIE. Modeling Aspects in Optical Metrology II. 7390: 73900J. arXiv:0907.3570. Bibcode:2009SPIE.7390E..0JH. doi:10.1117/12.828036. S2CID54741011.
Potzick, J.; et al. (2008). Kawahira, Hiroichi; Zurbrick, Larry S (eds.). "International photomask linewidth comparison by NIST and PTB". Proc. SPIE. Photomask Technology 2008. 7122: 71222P. Bibcode:2008SPIE.7122E..2PP. doi:10.1117/12.801435. S2CID109487376.
Tezuka, Y.; et al. (2007). Lercel, Michael J (ed.). "EUV exposure experiment using programmed multilayer defects for refining printability simulation". Proc. SPIE. Emerging Lithographic Technologies XI. 6517: 65172M. Bibcode:2007SPIE.6517E..2MT. doi:10.1117/12.711967. S2CID123632929.
Hoffmann, J.; et al. (2009). Bosse, Harald; Bodermann, Bernd; Silver, Richard M (eds.). "Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas". Proc. SPIE. Modeling Aspects in Optical Metrology II. 7390: 73900J. arXiv:0907.3570. Bibcode:2009SPIE.7390E..0JH. doi:10.1117/12.828036. S2CID54741011.