MEMS (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "MEMS" in English language version.

refsWebsite

Global rank English rank

22doi.org

2^nd place

8harvard.edu

18^th place

17^th place

7semanticscholar.org

11^th place

8^th place

4web.archive.org

1^st place

4nih.gov

4^th place

2books.google.com

3^rd place

2worldcat.org

5^th place

2eetimes.com

3,722^nd place

2,509^th place

2psu.edu

207^th place

136^th place

1patents.google.com

1,182^nd place

725^th place

1core.ac.uk

1,734^th place

1,312^th place

1iop.org

1,725^th place

1,828^th place

1evaluationengineering.com

low place

1cornell.edu

332^nd place

246^th place

1technologyreview.com

1,943^rd place

1,253^rd place

1berkeley.edu

580^th place

462^nd place

1umd.edu

1,747^th place

1,277^th place

1nthu.edu.tw

low place

1eenewsanalog.com

low place

1maximintegrated.com

low place

1electronicdesign.com

low place

7,853^rd place

1springer.com

274^th place

309^th place

1handle.net

102^nd place

76^th place

1azonano.com

low place

azonano.com

"Worldwide MEMS Systems Market Forecasted to Reach $72 Billion by 2011". AZoNano. 2007. Retrieved 5 Oct 2015.

berkeley.edu

www-inst.cs.berkeley.edu

Williams KR, Muller RS (1996). "Etch rates for micromachining processing" (PDF). Journal of Microelectromechanical Systems. 5 (4): 256–269. CiteSeerX 10.1.1.120.3130. doi:10.1109/84.546406. Archived from the original (PDF) on 2017-08-09. Retrieved 2017-10-26.

books.google.com

Gabriel K, Jarvis J, Trimmer W (1988). Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics: Report of the Workshop on Microelectromechanical Systems Research. National Science Foundation (sponsor). AT&T Bell Laboratories.
Acar C, Shkel AM (2008). MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness. Springer. p. 111. ISBN 978-0-387-09536-3.

core.ac.uk

Bergveld, Piet (October 1985). "The impact of MOSFET-based sensors" (PDF). Sensors and Actuators. 8 (2): 109–127. Bibcode:1985SeAc....8..109B. doi:10.1016/0250-6874(85)87009-8. ISSN 0250-6874. Archived from the original (PDF) on 2021-04-26. Retrieved 2019-10-16.

cornell.edu

cnf.cornell.edu

McCord MA, Rooks MJ (1997). "Electron Beam Lithography". In Choudhury PR (ed.). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. Vol. 1. London: SPIE. doi:10.1117/3.2265070.ch2. ISBN 978-0-8194-9786-4. Archived from the original on 2019-08-19. Retrieved 2011-01-28.

doi.org

Angell JB, Terry SC, Barth PW (1983). "Silicon Micromechanical Devices". Sci. Am. 248 (4): 44–55. Bibcode:1983SciAm.248d..44A. doi:10.1038/scientificamerican0483-44.
Nathanson HC, Wickstrom RA (1965). "A Resonant-Gate Silicon Surface Transistor with High-Q Band-Pass Properties". Appl. Phys. Lett. 7 (4): 84–86. Bibcode:1965ApPhL...7...84N. doi:10.1063/1.1754323.
Wilfinger RJ, Bardell PH, Chhabra DS (1968). "The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate". IBM J. Res. Dev. 12 (1): 113–8. doi:10.1147/rd.121.0113.
Bergveld, Piet (October 1985). "The impact of MOSFET-based sensors" (PDF). Sensors and Actuators. 8 (2): 109–127. Bibcode:1985SeAc....8..109B. doi:10.1016/0250-6874(85)87009-8. ISSN 0250-6874. Archived from the original (PDF) on 2021-04-26. Retrieved 2019-10-16.
Beliveau, A.; Spencer, G.T.; Thomas, K.A.; Roberson, S.L. (1999-12-01). "Evaluation of MEMS capacitive accelerometers". IEEE Design & Test of Computers. 16 (4): 48–56. doi:10.1109/54.808209.
Iannacci, Jacopo (2017-11-01). Introduction to MEMS and RF-MEMS: From the early days of microsystems to modern RF-MEMS passives. doi:10.1088/978-0-7503-1545-6ch1. ISBN 978-0-7503-1545-6. Retrieved 2019-08-06.
M. Birkholz; K.-E. Ehwald; T. Basmer; et al. (2013). "Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)". J. Appl. Phys. 113 (24): 244904–244904–8. Bibcode:2013JAP...113x4904B. doi:10.1063/1.4811351. PMC 3977869. PMID 25332510.
Polster T, Hoffmann M (2009). "Aluminium nitride based 3D, piezoelectric, tactile sensors". Procedia Chemistry. 1 (1): 144–7. doi:10.1016/j.proche.2009.07.036.
McCord MA, Rooks MJ (1997). "Electron Beam Lithography". In Choudhury PR (ed.). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. Vol. 1. London: SPIE. doi:10.1117/3.2265070.ch2. ISBN 978-0-8194-9786-4. Archived from the original on 2019-08-19. Retrieved 2011-01-28.
Shi, Xiaoqing; Boden, Stuart A. (2016). "17. Scanning helium ion beam lithography". In Robinson, Alex; Lawson, Richard (eds.). Frontiers of Nanoscience. Vol. 11. Elsevier. pp. 563–594. doi:10.1016/B978-0-08-100354-1.00017-X. ISBN 978-0-08-100354-1.
Williams KR, Muller RS (1996). "Etch rates for micromachining processing" (PDF). Journal of Microelectromechanical Systems. 5 (4): 256–269. CiteSeerX 10.1.1.120.3130. doi:10.1109/84.546406. Archived from the original (PDF) on 2017-08-09. Retrieved 2017-10-26.
Kovacs GT, Maluf NI, Petersen KE (1998). "Bulk micromachining of silicon" (PDF). Proc. IEEE. 86 (8): 1536–51. doi:10.1109/5.704259. Archived from the original (PDF) on 27 Oct 2017.
Chang FI, Yeh R, Lin G, et al. (1995). "Gas-phase silicon micromachining with xenon difluoride". In Bailey W, Motamedi ME, Luo FC (eds.). Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications. Vol. 2641. Austin, TX: SPIE. p. 117. doi:10.1117/12.220933. S2CID 39522253.
Brazzle JD, Dokmeci MR, Mastrangelo CH (2004). "Modeling and characterization of sacrificial polysilicon etching using vapor-phase xenon difluoride". 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest. IEEE. pp. 737–740. doi:10.1109/MEMS.2004.1290690. ISBN 978-0-7803-8265-7. S2CID 40417914.
Laermer F, Urban A (2005). "Milestones in deep reactive ion etching". The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Vol. 2. IEEE. pp. 1118–21. doi:10.1109/SENSOR.2005.1497272. ISBN 978-0-7803-8994-6. S2CID 28068644.
Bustillo JM, Howe RT, Muller RS (1998). "Surface Micromachining for Microelectromechanical Systems" (PDF). Proc. IEEE. 86 (8): 1552–74. CiteSeerX 10.1.1.120.4059. doi:10.1109/5.704260.
Hosseinian E, Pierron ON (2013). "Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films". Nanoscale. 5 (24): 12532–41. Bibcode:2013Nanos...512532H. doi:10.1039/C3NR04035F. PMID 24173603. S2CID 17970529.
Wang, Li-Feng; Huang, Qing-An; Han, Lei (2018). "RF MEMS Switch". Micro Electro Mechanical Systems. Micro/Nano Technologies. pp. 1039–76. doi:10.1007/978-981-10-5945-2_34. ISBN 978-981-10-5944-5.
Louizos LA, Athanasopoulos PG, Varty K (2012). "Microelectromechanical Systems and Nanotechnology. A Platform for the Next Stent Technological Era". Vasc. Endovasc. Surg. 46 (8): 605–9. doi:10.1177/1538574412462637. PMID 23047818. S2CID 27563384.
Hajati A, Kim SG (2011). "Ultra-wide bandwidth piezoelectric energy harvesting". Appl. Phys. Lett. 99 (8): 083105. Bibcode:2011ApPhL..99h3105H. doi:10.1063/1.3629551. hdl:1721.1/75264. S2CID 85547220.
Hajati A (2012). "Three-dimensional micro electromechanical system piezoelectric ultrasound transducer". Appl. Phys. Lett. 101 (25): 253101. Bibcode:2012ApPhL.101y3101H. doi:10.1063/1.4772469. S2CID 46718269.
Hajati A (2013). "Monolithic ultrasonic integrated circuits based on micromachined semi-ellipsoidal piezoelectric domes". Appl. Phys. Lett. 103 (20): 202906. Bibcode:2013ApPhL.103t2906H. doi:10.1063/1.4831988.

eenewsanalog.com

Clarke P (2016). "Smart MEMS microphones market emerges". EE News Analog. Retrieved 14 Jun 2019.

eetimes.com

"MEMS transistor integrated on CMOS". 6 December 2011.
Johnson RC (2007). "There's more to MEMS than meets the iPhone". EE Times. Retrieved 14 Jun 2019.

electronicdesign.com

"MEMS Relays Push Power Limits". 22 October 2019.

evaluationengineering.com

"MEMS technology is transforming high-density switch matrices". evaluationengineering.com. 2019-06-24. Retrieved 2019-08-06.

handle.net

hdl.handle.net

Hajati A, Kim SG (2011). "Ultra-wide bandwidth piezoelectric energy harvesting". Appl. Phys. Lett. 99 (8): 083105. Bibcode:2011ApPhL..99h3105H. doi:10.1063/1.3629551. hdl:1721.1/75264. S2CID 85547220.

harvard.edu

ui.adsabs.harvard.edu

Angell JB, Terry SC, Barth PW (1983). "Silicon Micromechanical Devices". Sci. Am. 248 (4): 44–55. Bibcode:1983SciAm.248d..44A. doi:10.1038/scientificamerican0483-44.
Nathanson HC, Wickstrom RA (1965). "A Resonant-Gate Silicon Surface Transistor with High-Q Band-Pass Properties". Appl. Phys. Lett. 7 (4): 84–86. Bibcode:1965ApPhL...7...84N. doi:10.1063/1.1754323.
Bergveld, Piet (October 1985). "The impact of MOSFET-based sensors" (PDF). Sensors and Actuators. 8 (2): 109–127. Bibcode:1985SeAc....8..109B. doi:10.1016/0250-6874(85)87009-8. ISSN 0250-6874. Archived from the original (PDF) on 2021-04-26. Retrieved 2019-10-16.
M. Birkholz; K.-E. Ehwald; T. Basmer; et al. (2013). "Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)". J. Appl. Phys. 113 (24): 244904–244904–8. Bibcode:2013JAP...113x4904B. doi:10.1063/1.4811351. PMC 3977869. PMID 25332510.
Hosseinian E, Pierron ON (2013). "Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films". Nanoscale. 5 (24): 12532–41. Bibcode:2013Nanos...512532H. doi:10.1039/C3NR04035F. PMID 24173603. S2CID 17970529.
Hajati A, Kim SG (2011). "Ultra-wide bandwidth piezoelectric energy harvesting". Appl. Phys. Lett. 99 (8): 083105. Bibcode:2011ApPhL..99h3105H. doi:10.1063/1.3629551. hdl:1721.1/75264. S2CID 85547220.
Hajati A (2012). "Three-dimensional micro electromechanical system piezoelectric ultrasound transducer". Appl. Phys. Lett. 101 (25): 253101. Bibcode:2012ApPhL.101y3101H. doi:10.1063/1.4772469. S2CID 46718269.
Hajati A (2013). "Monolithic ultrasonic integrated circuits based on micromachined semi-ellipsoidal piezoelectric domes". Appl. Phys. Lett. 103 (20): 202906. Bibcode:2013ApPhL.103t2906H. doi:10.1063/1.4831988.

iop.org

iopscience.iop.org

Iannacci, Jacopo (2017-11-01). Introduction to MEMS and RF-MEMS: From the early days of microsystems to modern RF-MEMS passives. doi:10.1088/978-0-7503-1545-6ch1. ISBN 978-0-7503-1545-6. Retrieved 2019-08-06.

maximintegrated.com

datasheets.maximintegrated.com

"DS3231m RTC" (PDF). DS3231m RTC Datasheet. Maxim Inc. 2015. Retrieved 26 Mar 2019.

nih.gov

pubmed.ncbi.nlm.nih.gov

M. Birkholz; K.-E. Ehwald; T. Basmer; et al. (2013). "Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)". J. Appl. Phys. 113 (24): 244904–244904–8. Bibcode:2013JAP...113x4904B. doi:10.1063/1.4811351. PMC 3977869. PMID 25332510.
Hosseinian E, Pierron ON (2013). "Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films". Nanoscale. 5 (24): 12532–41. Bibcode:2013Nanos...512532H. doi:10.1039/C3NR04035F. PMID 24173603. S2CID 17970529.
Louizos LA, Athanasopoulos PG, Varty K (2012). "Microelectromechanical Systems and Nanotechnology. A Platform for the Next Stent Technological Era". Vasc. Endovasc. Surg. 46 (8): 605–9. doi:10.1177/1538574412462637. PMID 23047818. S2CID 27563384.

ncbi.nlm.nih.gov

M. Birkholz; K.-E. Ehwald; T. Basmer; et al. (2013). "Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)". J. Appl. Phys. 113 (24): 244904–244904–8. Bibcode:2013JAP...113x4904B. doi:10.1063/1.4811351. PMC 3977869. PMID 25332510.

nthu.edu.tw

ee.nthu.edu.tw

Bustillo JM, Howe RT, Muller RS (1998). "Surface Micromachining for Microelectromechanical Systems" (PDF). Proc. IEEE. 86 (8): 1552–74. CiteSeerX 10.1.1.120.4059. doi:10.1109/5.704260.

patents.google.com

US patent 3614677A, Wilfinger RJ, "Electromechanical monolithic resonator", issued Oct 1971, assigned to International Business Machines Corp

psu.edu

citeseerx.ist.psu.edu

Williams KR, Muller RS (1996). "Etch rates for micromachining processing" (PDF). Journal of Microelectromechanical Systems. 5 (4): 256–269. CiteSeerX 10.1.1.120.3130. doi:10.1109/84.546406. Archived from the original (PDF) on 2017-08-09. Retrieved 2017-10-26.
Bustillo JM, Howe RT, Muller RS (1998). "Surface Micromachining for Microelectromechanical Systems" (PDF). Proc. IEEE. 86 (8): 1552–74. CiteSeerX 10.1.1.120.4059. doi:10.1109/5.704260.

semanticscholar.org

api.semanticscholar.org

Chang FI, Yeh R, Lin G, et al. (1995). "Gas-phase silicon micromachining with xenon difluoride". In Bailey W, Motamedi ME, Luo FC (eds.). Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications. Vol. 2641. Austin, TX: SPIE. p. 117. doi:10.1117/12.220933. S2CID 39522253.
Brazzle JD, Dokmeci MR, Mastrangelo CH (2004). "Modeling and characterization of sacrificial polysilicon etching using vapor-phase xenon difluoride". 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest. IEEE. pp. 737–740. doi:10.1109/MEMS.2004.1290690. ISBN 978-0-7803-8265-7. S2CID 40417914.
Laermer F, Urban A (2005). "Milestones in deep reactive ion etching". The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Vol. 2. IEEE. pp. 1118–21. doi:10.1109/SENSOR.2005.1497272. ISBN 978-0-7803-8994-6. S2CID 28068644.
Hosseinian E, Pierron ON (2013). "Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films". Nanoscale. 5 (24): 12532–41. Bibcode:2013Nanos...512532H. doi:10.1039/C3NR04035F. PMID 24173603. S2CID 17970529.
Louizos LA, Athanasopoulos PG, Varty K (2012). "Microelectromechanical Systems and Nanotechnology. A Platform for the Next Stent Technological Era". Vasc. Endovasc. Surg. 46 (8): 605–9. doi:10.1177/1538574412462637. PMID 23047818. S2CID 27563384.
Hajati A, Kim SG (2011). "Ultra-wide bandwidth piezoelectric energy harvesting". Appl. Phys. Lett. 99 (8): 083105. Bibcode:2011ApPhL..99h3105H. doi:10.1063/1.3629551. hdl:1721.1/75264. S2CID 85547220.
Hajati A (2012). "Three-dimensional micro electromechanical system piezoelectric ultrasound transducer". Appl. Phys. Lett. 101 (25): 253101. Bibcode:2012ApPhL.101y3101H. doi:10.1063/1.4772469. S2CID 46718269.

springer.com

link.springer.com

Wang, Li-Feng; Huang, Qing-An; Han, Lei (2018). "RF MEMS Switch". Micro Electro Mechanical Systems. Micro/Nano Technologies. pp. 1039–76. doi:10.1007/978-981-10-5945-2_34. ISBN 978-981-10-5944-5.

technologyreview.com

"Diamond Patterning Technique Could Transform Photonics". MIT Technology Review. Retrieved 2022-01-08.

umd.edu

ece.umd.edu

Kovacs GT, Maluf NI, Petersen KE (1998). "Bulk micromachining of silicon" (PDF). Proc. IEEE. 86 (8): 1536–51. doi:10.1109/5.704259. Archived from the original (PDF) on 27 Oct 2017.

web.archive.org

Bergveld, Piet (October 1985). "The impact of MOSFET-based sensors" (PDF). Sensors and Actuators. 8 (2): 109–127. Bibcode:1985SeAc....8..109B. doi:10.1016/0250-6874(85)87009-8. ISSN 0250-6874. Archived from the original (PDF) on 2021-04-26. Retrieved 2019-10-16.
McCord MA, Rooks MJ (1997). "Electron Beam Lithography". In Choudhury PR (ed.). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. Vol. 1. London: SPIE. doi:10.1117/3.2265070.ch2. ISBN 978-0-8194-9786-4. Archived from the original on 2019-08-19. Retrieved 2011-01-28.
Williams KR, Muller RS (1996). "Etch rates for micromachining processing" (PDF). Journal of Microelectromechanical Systems. 5 (4): 256–269. CiteSeerX 10.1.1.120.3130. doi:10.1109/84.546406. Archived from the original (PDF) on 2017-08-09. Retrieved 2017-10-26.
Kovacs GT, Maluf NI, Petersen KE (1998). "Bulk micromachining of silicon" (PDF). Proc. IEEE. 86 (8): 1536–51. doi:10.1109/5.704259. Archived from the original (PDF) on 27 Oct 2017.

worldcat.org

Bergveld, Piet (October 1985). "The impact of MOSFET-based sensors" (PDF). Sensors and Actuators. 8 (2): 109–127. Bibcode:1985SeAc....8..109B. doi:10.1016/0250-6874(85)87009-8. ISSN 0250-6874. Archived from the original (PDF) on 2021-04-26. Retrieved 2019-10-16.
Chang, Floy I-Jung (1995). Xenon difluoride etching of silicon for MEMS (M.S.). Los Angeles: University of California. OCLC 34531873.