Rösch, L; et al. "Silicon Compounds, Organic." Ullmann's Encyclopedia of Industrial Chemistry. Wiley-VCH, Weinheim, 2005. doi:10.1002/14356007.a24_021
Rochow, E. The Direct Synthesis of Organosilicon Compounds. J. Am. Chem. Soc.1945, 67, 963. doi:10.1021/ja01222a026
Olah, G; et al. "Methyltrichlorosilane." Encyclopedia of Reagents for Organic Synthesis. New York: John Wiley & Sons, Inc., 2001. doi:10.1002/047084289X.rm265
Bosi, M; et al. "Defect structure and strain reduction of 3C-SiC/Si layers obtained with the use of a buffer layer and methyltrichlorosilane addition" CrystEngComm 2016, 18, 2770-2779 doi:10.1039/C6CE00280C
