Plasma-enhanced chemical vapor deposition (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Plasma-enhanced chemical vapor deposition" in English language version.

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doi.org

ethw.org

  • "First-Hand:The Birth of Glow Discharge Chemistry (aka PECVD) - Engineering and Technology History Wiki". ethw.org. 17 March 2015. Retrieved 2018-07-13.

harvard.edu

ui.adsabs.harvard.edu

inpi.fr

bases-brevets.inpi.fr

patents.google.com

worldcat.org