Semiconductor device (English Wikipedia)

Lei, Wei-Sheng; Kumar, Ajay; Yalamanchili, Rao (2012-04-06). "Die singulation technologies for advanced packaging: A critical review". Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 30 (4): 040801. Bibcode:2012JVSTB..30d0801L. doi:10.1116/1.3700230. ISSN 2166-2746.

hitachi.com

Kure, Tokuo; Hanaoka, Hideo; Sugiura, Takumi; Nakagawa, Shinya (2007). "Clean-room Technologies for the Mini-environment Age" (PDF). Hitachi Review. 56 (3): 70–74. CiteSeerX 10.1.1.493.1460. S2CID 30883737. Archived (PDF) from the original on 2021-11-01. Retrieved 2021-11-01.

icinsights.com

"Semiconductor Shipments Forecast to Exceed 1 Trillion Devices in 2018". www.icinsights.com. Retrieved 2018-04-16. Annual semiconductor unit shipments (integrated circuits and Opto-sensor-discrete, or O-S-D, devices) are expected to grow 9% [..] For 2018, semiconductor unit shipments are forecast to climb to 1,075.1 billion, which equates to 9% growth for the year. Starting in 1978 with 32.6 billion units and going through 2018, the compound annual growth rate for semiconductor units is forecast to be 9.1%, a solid growth figure over the 40-year span. [..] In 2018, O-S-D devices are forecast to account for 70% of total semiconductor units compared to 30% for ICs.

ieee.org

ieeexplore.ieee.org

Hendrik Purwins; Bernd Barak; Ahmed Nagi; Reiner Engel; Uwe Höckele; Andreas Kyek; Srikanth Cherla; Benjamin Lenz; Günter Pfeifer; Kurt Weinzierl (2014). "Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition". IEEE/ASME Transactions on Mechatronics. 19 (1): 1–8. doi:10.1109/TMECH.2013.2273435. S2CID 12369827. Retrieved November 9, 2015.
Wang, H. P.; Kim, S. C.; Liu, B. (2014). Advanced FOUP purge using diffusers for FOUP door-off application. 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014). pp. 120–124. doi:10.1109/ASMC.2014.6846999. ISBN 978-1-4799-3944-2. S2CID 2482339.
450mm FOUP/LPU system in advanced semiconductor manufacturing processes: A study on the minimization of oxygen content inside FOUP when the door is opened. 2015 Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM).
Lin, Tee; Fu, Ben-Ran; Hu, Shih-Cheng; Tang, Yi-Han (2018). "Moisture Prevention in a Pre-Purged Front-Opening Unified Pod (FOUP) During Door Opening in a Mini-Environment". IEEE Transactions on Semiconductor Manufacturing. 31 (1): 108–115. doi:10.1109/TSM.2018.2791985. S2CID 25469704.
Kim, Seong Chan; Schelske, Greg (2016). FOUP purge performance improvement using EFEM flow converter. 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). pp. 6–11. doi:10.1109/ASMC.2016.7491075. ISBN 978-1-5090-0270-2. S2CID 3240442.
Benalcazar, David; Lin, Tee; Hu, Ming-Hsuan; Ali Zargar, Omid; Lin, Shao-Yu; Shih, Yang-Cheng; Leggett, Graham (2022). "A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)". IEEE Transactions on Semiconductor Manufacturing. 35 (4): 670–679. doi:10.1109/TSM.2022.3209221. S2CID 252555815.
Lin, Tee; Ali Zargar, Omid; Juina, Oscar; Lee, Tzu-Chieh; Sabusap, Dexter Lyndon; Hu, Shih-Cheng; Leggett, Graham (2020). "Performance of Different Front-Opening Unified Pod (FOUP) Moisture Removal Techniques With Local Exhaust Ventilation System". IEEE Transactions on Semiconductor Manufacturing. 33 (2): 310–315. doi:10.1109/TSM.2020.2977122. S2CID 213026336.

ieee.org

"IEEE Andrew S. Grove Award Recipients". IEEE Andrew S. Grove Award. Institute of Electrical and Electronics Engineers. Archived from the original on September 9, 2018. Retrieved 4 July 2019.

intel.com

"The Breakthrough Advantage for FPGAs with Tri-Gate Technology" (PDF). Intel. 2014. Archived (PDF) from the original on 2022-10-09. Retrieved 4 July 2019.

invent.org

"Martin Atalla in Inventors Hall of Fame, 2009". Retrieved 21 June 2013.
"Dawon Kahng". National Inventors Hall of Fame. Retrieved 27 June 2019.

navitassemi.com

"Gallium nitride semiconductors: The Next Generation of Power | Navitas". Retrieved 2023-05-02.

psu.edu

citeseerx.ist.psu.edu

Kure, Tokuo; Hanaoka, Hideo; Sugiura, Takumi; Nakagawa, Shinya (2007). "Clean-room Technologies for the Mini-environment Age" (PDF). Hitachi Review. 56 (3): 70–74. CiteSeerX 10.1.1.493.1460. S2CID 30883737. Archived (PDF) from the original on 2021-11-01. Retrieved 2021-11-01.

semanticscholar.org

api.semanticscholar.org

Hendrik Purwins; Bernd Barak; Ahmed Nagi; Reiner Engel; Uwe Höckele; Andreas Kyek; Srikanth Cherla; Benjamin Lenz; Günter Pfeifer; Kurt Weinzierl (2014). "Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition". IEEE/ASME Transactions on Mechatronics. 19 (1): 1–8. doi:10.1109/TMECH.2013.2273435. S2CID 12369827. Retrieved November 9, 2015.
Wang, H. P.; Kim, S. C.; Liu, B. (2014). Advanced FOUP purge using diffusers for FOUP door-off application. 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014). pp. 120–124. doi:10.1109/ASMC.2014.6846999. ISBN 978-1-4799-3944-2. S2CID 2482339.
Lin, Tee; Fu, Ben-Ran; Hu, Shih-Cheng; Tang, Yi-Han (2018). "Moisture Prevention in a Pre-Purged Front-Opening Unified Pod (FOUP) During Door Opening in a Mini-Environment". IEEE Transactions on Semiconductor Manufacturing. 31 (1): 108–115. doi:10.1109/TSM.2018.2791985. S2CID 25469704.
Kure, Tokuo; Hanaoka, Hideo; Sugiura, Takumi; Nakagawa, Shinya (2007). "Clean-room Technologies for the Mini-environment Age" (PDF). Hitachi Review. 56 (3): 70–74. CiteSeerX 10.1.1.493.1460. S2CID 30883737. Archived (PDF) from the original on 2021-11-01. Retrieved 2021-11-01.
Kim, Seong Chan; Schelske, Greg (2016). FOUP purge performance improvement using EFEM flow converter. 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). pp. 6–11. doi:10.1109/ASMC.2016.7491075. ISBN 978-1-5090-0270-2. S2CID 3240442.
Benalcazar, David; Lin, Tee; Hu, Ming-Hsuan; Ali Zargar, Omid; Lin, Shao-Yu; Shih, Yang-Cheng; Leggett, Graham (2022). "A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)". IEEE Transactions on Semiconductor Manufacturing. 35 (4): 670–679. doi:10.1109/TSM.2022.3209221. S2CID 252555815.
Lin, Tee; Ali Zargar, Omid; Juina, Oscar; Lee, Tzu-Chieh; Sabusap, Dexter Lyndon; Hu, Shih-Cheng; Leggett, Graham (2020). "Performance of Different Front-Opening Unified Pod (FOUP) Moisture Removal Techniques With Local Exhaust Ventilation System". IEEE Transactions on Semiconductor Manufacturing. 33 (2): 310–315. doi:10.1109/TSM.2020.2977122. S2CID 213026336.
Motoyoshi, M. (2009). "Through-Silicon Via (TSV)" (PDF). Proceedings of the IEEE. 97 (1): 43–48. doi:10.1109/JPROC.2008.2007462. ISSN 0018-9219. S2CID 29105721. Archived from the original (PDF) on 2019-07-19.

pdfs.semanticscholar.org

Motoyoshi, M. (2009). "Through-Silicon Via (TSV)" (PDF). Proceedings of the IEEE. 97 (1): 43–48. doi:10.1109/JPROC.2008.2007462. ISSN 0018-9219. S2CID 29105721. Archived from the original (PDF) on 2019-07-19.

uspto.gov

"Remarks by Director Iancu at the 2019 International Intellectual Property Conference". United States Patent and Trademark Office. June 10, 2019. Retrieved 20 July 2019.

web.archive.org

Kure, Tokuo; Hanaoka, Hideo; Sugiura, Takumi; Nakagawa, Shinya (2007). "Clean-room Technologies for the Mini-environment Age" (PDF). Hitachi Review. 56 (3): 70–74. CiteSeerX 10.1.1.493.1460. S2CID 30883737. Archived (PDF) from the original on 2021-11-01. Retrieved 2021-11-01.
Motoyoshi, M. (2009). "Through-Silicon Via (TSV)" (PDF). Proceedings of the IEEE. 97 (1): 43–48. doi:10.1109/JPROC.2008.2007462. ISSN 0018-9219. S2CID 29105721. Archived from the original (PDF) on 2019-07-19.
"IEEE Andrew S. Grove Award Recipients". IEEE Andrew S. Grove Award. Institute of Electrical and Electronics Engineers. Archived from the original on September 9, 2018. Retrieved 4 July 2019.

worldcat.org

search.worldcat.org

Lei, Wei-Sheng; Kumar, Ajay; Yalamanchili, Rao (2012-04-06). "Die singulation technologies for advanced packaging: A critical review". Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 30 (4): 040801. Bibcode:2012JVSTB..30d0801L. doi:10.1116/1.3700230. ISSN 2166-2746.
Motoyoshi, M. (2009). "Through-Silicon Via (TSV)" (PDF). Proceedings of the IEEE. 97 (1): 43–48. doi:10.1109/JPROC.2008.2007462. ISSN 0018-9219. S2CID 29105721. Archived from the original (PDF) on 2019-07-19.