Sputtering (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Sputtering" in English language version.

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  • Lobbia, R.B.; Polk, J.E.; Hofer, R.R.; Chaplin, V.H; Jorns, B. (2019-08-19). "Accelerating 23,000 hours of ground test backsputtered carbon on a magnetically shielded Hall thruster". AIAA Propulsion and Energy 2019 Forum. doi:10.2514/6.2019-3898. ISBN 978-1-62410-590-6.
  • P. Sigmund, Nucl. Instrum. Methods Phys. Res. B (1987). "Mechanisms and theory of physical sputtering by particle impact". Nuclear Instruments and Methods in Physics Research Section B. 27 (1): 1–20. Bibcode:1987NIMPB..27....1S. doi:10.1016/0168-583X(87)90004-8.
  • M.W. Thompson (1962). "Energy spectrum of ejected atoms during the high- energy sputtering of gold". Phil. Mag. 18 (152): 377. Bibcode:1968PMag...18..377T. doi:10.1080/14786436808227358.
  • Mai Ghaly & R. S. Averback (1994). "Effect of viscous flow on ion damage near solid surfaces". Physical Review Letters. 72 (3): 364–367. Bibcode:1994PhRvL..72..364G. doi:10.1103/PhysRevLett.72.364. PMID 10056412.
  • S. Bouneau; A. Brunelle; S. Della-Negra; J. Depauw; D. Jacquet; Y. L. Beyec; M. Pautrat; M. Fallavier; J. C. Poizat & H. H. Andersen (2002). "Very large gold and silver sputtering yields induced by keV to MeV energy Aun clusters (n=1–13)". Phys. Rev. B. 65 (14): 144106. Bibcode:2002PhRvB..65n4106B. doi:10.1103/PhysRevB.65.144106. S2CID 120941773.
  • T. Schenkel; Briere, M.; Schmidt-Böcking, H.; Bethge, K.; Schneider, D.; et al. (1997). "Electronic Sputtering of Thin Conductors by Neutralization of Slow Highly Charged Ions". Physical Review Letters. 78 (12): 2481. Bibcode:1997PhRvL..78.2481S. doi:10.1103/PhysRevLett.78.2481. S2CID 56361399.
  • T. Neidhart; Pichler, F.; Aumayr, F.; Winter, HP.; Schmid, M.; Varga, P.; et al. (1995). "Potential sputtering of lithium fluoride by slow multicharged ions". Physical Review Letters. 74 (26): 5280–5283. Bibcode:1995PhRvL..74.5280N. doi:10.1103/PhysRevLett.74.5280. PMID 10058728. S2CID 33930734.
  • M. Sporn; Libiseller, G.; Neidhart, T.; Schmid, M.; Aumayr, F.; Winter, HP.; Varga, P.; Grether, M.; Niemann, D.; Stolterfoht, N.; et al. (1997). "Potential Sputtering of Clean SiO2 by Slow Highly Charged Ions". Physical Review Letters. 79 (5): 945. Bibcode:1997PhRvL..79..945S. doi:10.1103/PhysRevLett.79.945. S2CID 59576101.
  • F. Aumayr & H. P. Winter (2004). "Potential sputtering". Philosophical Transactions of the Royal Society A. 362 (1814): 77–102. Bibcode:2004RSPTA.362...77A. doi:10.1098/rsta.2003.1300. PMID 15306277. S2CID 21891721.
  • G. Hayderer; Schmid, M.; Varga, P.; Winter, H; Aumayr, F.; Wirtz, L.; Lemell, C.; Burgdörfer, J.; Hägg, L.; Reinhold, C.; et al. (1999). "Threshold for Potential Sputtering of LiF" (PDF). Physical Review Letters. 83 (19): 3948. Bibcode:1999PhRvL..83.3948H. doi:10.1103/PhysRevLett.83.3948.
  • T. A. Schoolcraft and B. J. Garrison, Journal of the American Chemical Society (1991). "Initial stages of etching of the silicon Si110 2x1 surface by 3.0-eV normal incident fluorine atoms: a molecular dynamics study". Journal of the American Chemical Society. 113 (22): 8221. doi:10.1021/ja00022a005.
  • J. Küppers (1995). "The hydrogen surface chemistry of carbon as a plasma facing material". Surface Science Reports. 22 (7–8): 249–321. Bibcode:1995SurSR..22..249K. doi:10.1016/0167-5729(96)80002-1.
  • E. Salonen; Nordlund, K.; Keinonen, J.; Wu, C.; et al. (2001). "Swift chemical sputtering of amorphous hydrogenated carbon". Physical Review B. 63 (19): 195415. Bibcode:2001PhRvB..63s5415S. doi:10.1103/PhysRevB.63.195415. S2CID 67829382.
  • Farnsworth, H. E.; Schlier, R. E.; George, T. H.; Burger, R. M. (1955). "Ion Bombardment-Cleaning of Germanium and Titanium as Determined by Low-Energy Electron Diffraction". Journal of Applied Physics. 26 (2). AIP Publishing: 252–253. Bibcode:1955JAP....26..252F. doi:10.1063/1.1721972. ISSN 0021-8979.
  • Farnsworth, H. E.; Schlier, R. E.; George, T. H.; Burger, R. M. (1958). "Application of the Ion Bombardment Cleaning Method to Titanium, Germanium, Silicon, and Nickel as Determined by Low-Energy Electron Diffraction". Journal of Applied Physics. 29 (8). AIP Publishing: 1150–1161. Bibcode:1958JAP....29.1150F. doi:10.1063/1.1723393. ISSN 0021-8979.
  • Aydin, Erkan; Altinkaya, Cesur; Smirnov, Yury; Yaqin, Muhammad A.; Zanoni, Kassio P. S.; Paliwal, Abhyuday; Firdaus, Yuliar; Allen, Thomas G.; Anthopoulos, Thomas D.; Bolink, Henk J.; Morales-Masis, Monica (2021-11-03). "Sputtered transparent electrodes for optoelectronic devices: Induced damage and mitigation strategies". Matter. 4 (11): 3549–3584. doi:10.1016/j.matt.2021.09.021. hdl:10754/673293. ISSN 2590-2393. S2CID 243469180.
  • Raut, Hemant; Ganesh, V. (2011). "Anti-reflective coatings: A critical, in-depth review". Energy & Environmental Science. 4 (10): 3779-3804. doi:10.1039/C1EE01297E.

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