Surface micromachining (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Surface micromachining" in English language version.

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doi.org

Bustillo, J.M.; R.T. Howe; R.S. Muller (August 1998). "Surface micromachining for microelectromechanical systems". Proceedings of the IEEE. 86 (8): 1552–1574. CiteSeerX 10.1.1.120.4059. doi:10.1109/5.704260.
Boser, B.E.; R.T. Howe (March 1996). "Surface Micro-machined Accelerometers". IEEE Journal of Solid-State Circuits. 31 (3): 366–375. Bibcode:1996IJSSC..31..366B. doi:10.1109/4.494198.

harvard.edu

ui.adsabs.harvard.edu

Boser, B.E.; R.T. Howe (March 1996). "Surface Micro-machined Accelerometers". IEEE Journal of Solid-State Circuits. 31 (3): 366–375. Bibcode:1996IJSSC..31..366B. doi:10.1109/4.494198.

psu.edu

citeseerx.ist.psu.edu

Bustillo, J.M.; R.T. Howe; R.S. Muller (August 1998). "Surface micromachining for microelectromechanical systems". Proceedings of the IEEE. 86 (8): 1552–1574. CiteSeerX 10.1.1.120.4059. doi:10.1109/5.704260.