Bulla, D.A.P; Morimoto, N.I (1998). "Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications". Thin Solid Films. 334 (1–2): 60–64. Bibcode:1998TSF...334...60B. doi:10.1016/S0040-6090(98)01117-1.
Rösch, Lutz; John, Peter and Reitmeier, Rudolf "Silicon Compounds, Organic" in Ullmann's Encyclopedia of Industrial Chemistry, Wiley-VCH, Weinheim, 2002. doi:10.1002/14356007.a24_021.
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Bulla, D.A.P; Morimoto, N.I (1998). "Deposition of thick TEOS PECVD silicon oxide layers for integrated optical waveguide applications". Thin Solid Films. 334 (1–2): 60–64. Bibcode:1998TSF...334...60B. doi:10.1016/S0040-6090(98)01117-1.
