ASTM D5544 Standard Method for On-Line Measurement of residue After Evaporation of High Purity Water.
ASTM D5997 - 96 Standard Test Method for On-Line Monitoring of Total Carbon, Inorganic Carbon in Water by Ultraviolet, Persulfate Oxidation, and Membrane Conductivity Detection.
ASTM D4517 Standard Test Method for Low-Level Total Silica in High-Purity Water by Flameless Atomic Absorption Spectroscopy
ASTM D859 Standard Test Method for Silica in Water
ASTM F1094 Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method