O'Regan, Gerard (2016), O'Regan, Gerard (ed.), "The Invention of the Integrated Circuit and the Birth of Silicon Valley", Introduction to the History of Computing: A Computing History Primer, Undergraduate Topics in Computer Science, Cham: Springer International Publishing, pp. 93–100, doi:10.1007/978-3-319-33138-6_7, ISBN978-3-319-33138-6
Wu, Qiang; Li, Yanli; Yang, Yushu; Chen, Shoumian; Zhao, Yuhang (26 June 2020). "The Law that Guides the Development of Photolithography Technology and the Methodology in the Design of Photolithographic Process". 2020 China Semiconductor Technology International Conference (CSTIC). IEEE. pp. 1–6. doi:10.1109/CSTIC49141.2020.9282436. ISBN978-1-7281-6558-5.