Virtual metrology (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Virtual metrology" in English language version.

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Purwins, Hendrik; Bernd, Barak; Nagi, Ahmed; Engel, Reiner; Hoeckele, Uwe; Kyek, Andreas; Cherla, Srikanth; Lenz, Benjamin; Pfeifer, Guenther; Weinzierl, Kurt (2014). "Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition" (PDF). IEEE/ASME Transactions on Mechatronics. 19 (1): 1–8. doi:10.1109/TMECH.2013.2273435. S2CID 12369827.

Purwins, Hendrik; Bernd, Barak; Nagi, Ahmed; Engel, Reiner; Hoeckele, Uwe; Kyek, Andreas; Cherla, Srikanth; Lenz, Benjamin; Pfeifer, Guenther; Weinzierl, Kurt (2014). "Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition" (PDF). IEEE/ASME Transactions on Mechatronics. 19 (1): 1–8. doi:10.1109/TMECH.2013.2273435. S2CID 12369827.
Susto, Gian Antonio; Pampuri, Simone; Schirru, Andrea; Beghi, Alessandro; De Nicolao, Giuseppe (2015-01-01). "Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach". Computers & Operations Research. 53: 328–337. doi:10.1016/j.cor.2014.05.008.
Susto, G. A.; Johnston, A. B.; O'Hara, P. G.; McLoone, S. (2013-08-01). "Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes". 2013 IEEE International Conference on Automation Science and Engineering (CASE). pp. 201–206. doi:10.1109/CoASE.2013.6653980. ISBN 978-1-4799-1515-6. S2CID 15432891.

Purwins, Hendrik; Bernd, Barak; Nagi, Ahmed; Engel, Reiner; Hoeckele, Uwe; Kyek, Andreas; Cherla, Srikanth; Lenz, Benjamin; Pfeifer, Guenther; Weinzierl, Kurt (2014). "Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition" (PDF). IEEE/ASME Transactions on Mechatronics. 19 (1): 1–8. doi:10.1109/TMECH.2013.2273435. S2CID 12369827.
Susto, G. A.; Johnston, A. B.; O'Hara, P. G.; McLoone, S. (2013-08-01). "Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes". 2013 IEEE International Conference on Automation Science and Engineering (CASE). pp. 201–206. doi:10.1109/CoASE.2013.6653980. ISBN 978-1-4799-1515-6. S2CID 15432891.