Chang, R. P. H.; Chang, C. C.; Darac, S. (1 de enero de 1982). «Hydrogen plasma etching of semiconductors and their oxides». Journal of Vacuum Science & Technology20 (1): 45-50. Bibcode:1982JVST...20...45C. ISSN0022-5355. doi:10.1116/1.571307.
Coburn, J. W.; Winters, Harold F. (1 de mayo de 1979). «Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching». Journal of Applied Physics50 (5): 3189-3196. Bibcode:1979JAP....50.3189C. ISSN0021-8979. doi:10.1063/1.326355.
Zia, A. W.; Wang, Y. -Q.; Lee, S. (2015). «Effect of Physical and Chemical Plasma Etching on Surface Wettability of Carbon Fiber-Reinforced Polymer Composites for Bone Plate Applications». Advances in Polymer Technology34: n/a. doi:10.1002/adv.21480.
Wasy, A.; Balakrishnan, G.; Lee, S. H.; Kim, J. K.; Kim, D. G.; Kim, T. G.; Song, J. I. (2014). «Argon plasma treatment on metal substrates and effects on diamond-like carbon (DLC) coating properties». Crystal Research and Technology49 (1): 55-62. Bibcode:2014CryRT..49...55W. doi:10.1002/crat.201300171.
Keizo Suzuki; Sadayuki Okudaira; Norriyuki Sakudo; Ichiro Kanomata (11 de noviembre de 1977). «Microwave Plasma Etching». Japanese Journal of Applied Physics16 (11): 1979-1984. Bibcode:1977JaJAP..16.1979S. doi:10.1143/jjap.16.1979.
Chang, R. P. H.; Chang, C. C.; Darac, S. (1 de enero de 1982). «Hydrogen plasma etching of semiconductors and their oxides». Journal of Vacuum Science & Technology20 (1): 45-50. Bibcode:1982JVST...20...45C. ISSN0022-5355. doi:10.1116/1.571307.
Coburn, J. W.; Winters, Harold F. (1 de mayo de 1979). «Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching». Journal of Applied Physics50 (5): 3189-3196. Bibcode:1979JAP....50.3189C. ISSN0021-8979. doi:10.1063/1.326355.
Wasy, A.; Balakrishnan, G.; Lee, S. H.; Kim, J. K.; Kim, D. G.; Kim, T. G.; Song, J. I. (2014). «Argon plasma treatment on metal substrates and effects on diamond-like carbon (DLC) coating properties». Crystal Research and Technology49 (1): 55-62. Bibcode:2014CryRT..49...55W. doi:10.1002/crat.201300171.
Keizo Suzuki; Sadayuki Okudaira; Norriyuki Sakudo; Ichiro Kanomata (11 de noviembre de 1977). «Microwave Plasma Etching». Japanese Journal of Applied Physics16 (11): 1979-1984. Bibcode:1977JaJAP..16.1979S. doi:10.1143/jjap.16.1979.
Chang, R. P. H.; Chang, C. C.; Darac, S. (1 de enero de 1982). «Hydrogen plasma etching of semiconductors and their oxides». Journal of Vacuum Science & Technology20 (1): 45-50. Bibcode:1982JVST...20...45C. ISSN0022-5355. doi:10.1116/1.571307.
Coburn, J. W.; Winters, Harold F. (1 de mayo de 1979). «Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching». Journal of Applied Physics50 (5): 3189-3196. Bibcode:1979JAP....50.3189C. ISSN0021-8979. doi:10.1063/1.326355.