لیتوگرافی فرابنفش فرین (Persian Wikipedia)

Analysis of information sources in references of the Wikipedia article "لیتوگرافی فرابنفش فرین" in Persian language version.

refsWebsite

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asml.com

O'Sullivan, Gerry; Li, Bowen; D'Arcy, Rebekah; Dunne, Padraig; Hayden, Paddy; Kilbane, Deirdre; McCormack, Tom; Ohashi, Hayato; O'Reilly, Fergal; Sheridan, Paul; Sokell, Emma; Suzuki, Chihiro; Higashiguchi, Takeshi (2015). "Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development". Journal of Physics B: Atomic, Molecular and Optical Physics. 48 (144025): 144025. Bibcode:2015JPhB...48n4025O. doi:10.1088/0953-4075/48/14/144025. S2CID 124221931.
Bjorkholm, J.; Bokor, J.; Eichner, L.; Freeman, R.; Mansfield, W.; Szeto, L.; Taylor, D.; Tennant, D.; Wood II, O.; Jewell, T.; White, D.; Waskiewicz, W.; Windt, D.; MacDowell, A. (1991). "Soft x-ray projection lithography". Optics and Photonics News. 2 (5): 27. doi:10.1364/OPN.2.5.000027.

O'Sullivan, Gerry; Li, Bowen; D'Arcy, Rebekah; Dunne, Padraig; Hayden, Paddy; Kilbane, Deirdre; McCormack, Tom; Ohashi, Hayato; O'Reilly, Fergal; Sheridan, Paul; Sokell, Emma; Suzuki, Chihiro; Higashiguchi, Takeshi (2015). "Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development". Journal of Physics B: Atomic, Molecular and Optical Physics. 48 (144025): 144025. Bibcode:2015JPhB...48n4025O. doi:10.1088/0953-4075/48/14/144025. S2CID 124221931.

O'Sullivan, Gerry; Li, Bowen; D'Arcy, Rebekah; Dunne, Padraig; Hayden, Paddy; Kilbane, Deirdre; McCormack, Tom; Ohashi, Hayato; O'Reilly, Fergal; Sheridan, Paul; Sokell, Emma; Suzuki, Chihiro; Higashiguchi, Takeshi (2015). "Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development". Journal of Physics B: Atomic, Molecular and Optical Physics. 48 (144025): 144025. Bibcode:2015JPhB...48n4025O. doi:10.1088/0953-4075/48/14/144025. S2CID 124221931.

O'Sullivan, Gerry; Li, Bowen; D'Arcy, Rebekah; Dunne, Padraig; Hayden, Paddy; Kilbane, Deirdre; McCormack, Tom; Ohashi, Hayato; O'Reilly, Fergal; Sheridan, Paul; Sokell, Emma; Suzuki, Chihiro; Higashiguchi, Takeshi (2015). "Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development". Journal of Physics B: Atomic, Molecular and Optical Physics. 48 (144025): 144025. Bibcode:2015JPhB...48n4025O. doi:10.1088/0953-4075/48/14/144025. S2CID 124221931.