E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Münchmeyer: Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process). In: Microelectronic Engineering. 4, No. 1, 1986, p. 35-56 (doi:10.1016/0167-9317(86)90004-3).
