Lithographie à faisceau d'électrons (French Wikipedia)

Analysis of information sources in references of the Wikipedia article "Lithographie à faisceau d'électrons" in French language version.

refsWebsite

Global rank French rank

1,131^st place

1,455^th place

5,739^th place

7,442^nd place

2,509^th place

3,091^st place

bell-labs.com

cm.bell-labs.com

(en) Scalpel: A Projection Electron Beam approach to suboptical Lithography [PDF]

ibm.com

research.ibm.com

(en) H.C.Pfeiffer et al., Prevail—Electron projection technology approach for next-generation lithography, IBM J.Res. & Dev. Vol.45, 5, 2001
(en) H.C. Pfeiffer, T.C.Groves, T.H.Newman, High Throughput High Resolution Electron Lithography, IBM. Res. Develop. vol.32, No 4, July 1988 [PDF]

lbl.gov

www-library.lbl.gov

(en) J. A. Liddle et al., Mat. Res. Soc. Symp. Proc. vol. 739 issue n°19, 2003, p.19-30 [PDF]