(en) W. Spengler, R. Kaiser, A. N. Christensen et G. Müller-Vogt, « Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN », Physical Review B, vol. 17, no 3, , p. 1095-1101 (DOI10.1103/PhysRevB.17.1095, Bibcode1978PhRvB..17.1095S, lire en ligne)
books.google.com
(en) Hugh O. Pierson, Handbook of refractory carbides and nitrides : properties, characteristics, processing, and applications, William Andrew, , 340 p. (ISBN0-8155-1392-5, lire en ligne), p. 193
doi.org
dx.doi.org
(en) D. S. Stone, K. B. Yoder et W. D. Sproul, « Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation », Journal of Vacuum Science & Technology A, vol. 9, no 4, , p. 2543-2547 (DOI10.1116/1.577270, Bibcode1991JVST....9.2543S, lire en ligne)
(en) W. Spengler, R. Kaiser, A. N. Christensen et G. Müller-Vogt, « Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN », Physical Review B, vol. 17, no 3, , p. 1095-1101 (DOI10.1103/PhysRevB.17.1095, Bibcode1978PhRvB..17.1095S, lire en ligne)
(en) Valerii M. Vinokur, Tatyana I. Baturina, Mikhail V. Fistul, Aleksey Yu. Mironov, Mikhail R. Baklanov et Christoph Strunk, « Superinsulator and quantum synchronization », Nature, vol. 452, no 7187, , p. 613-615 (PMID18385735, DOI10.1038/nature06837, Bibcode2008Natur.452..613V, lire en ligne)
(en) Keizo Uematsu, Nobuo Kieda, Osamu Sakurai, Nobuyasu Mizutani et Masanori Kato, « Effect of Non-stoichiometry on the Sintering of TiNx », Journal of the Ceramic Association, Japan, vol. 90, no 1046, , p. 597-603 (DOI10.2109/jcersj1950.90.1046_597, lire en ligne)
(en) G. Abadias, « Stress and preferred orientation in nitride-based PVD coatings », Surface and Coatings Technology, vol. 202, no 11, , p. 2223-2235 (DOI10.1016/j.surfcoat.2007.08.029, lire en ligne)
(en) M.Birkholz, K.-E. Ehwald, D. Wolansky, I. Costina, C. Baristiran-Kaynak, M. Fröhlich, H. Beyer, A. Kapp et F. Lisdat, « Corrosion-resistant metal layers from a CMOS process for bioelectronic applications », Surface and Coatings Technology, vol. 204, nos 12-13, , p. 2055-2059 (DOI10.1016/j.surfcoat.2009.09.075, lire en ligne)
(en) Hugo Hämmerle, Karin Kobuch, Konrad Kohler, Wilfried Nisch, Helmut Sachs et Martin Stelzle, « Biostability of micro-photodiode arrays for subretinal implantation », Biomaterials, vol. 23, no 3, , p. 797-804 (PMID11771699, DOI10.1016/S0142-9612(01)00185-5, lire en ligne)
(en) M. Birkholz, K.‐E. Ehwald, P. Kulse, J. Drews, M. Fröhlich, U. Haak, M. Kaynak, E. Matthus, K. Schulz et D. Wolansky, « Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices », Advanced Functional Materials, vol. 21, no 9, , p. 1652-1656 (DOI10.1002/adfm.201002062, lire en ligne)
(en) Thaddeus G. Dziura, Benjamin Bunday, Casey Smith, Muhammad M. Hussain, Rusty Harris, Xiafang Zhang et Jimmy M. Price, « Measurement of high-k and metal film thickness on FinFET sidewalls using scatterometry », Metrology, Inspection, and Process Control for Microlithography XXII. Edited by John A. Allgair, Christopher J. Raymond, Proceedings of the SPIE, vol. 6922, , article no 69220V (DOI10.1117/12.773593, Bibcode2008SPIE.6922E..29D, lire en ligne)
(en) Matheus A. Tunes, Felipe C. da Silva, Osmane Camara, Claudio G. Schön, Julio C. Sagás, Luis C. Fontana, Stephen E. Donnelly, Graeme Greaves et Philip D. Edmondson, « Energetic particle irradiation study of TiN coatings: are these films appropriate for accident tolerant fuels? », Journal of Nuclear Materials, vol. 512, , p. 239-245 (DOI10.1016/j.jnucmat.2018.10.013, Bibcode2018JNuM..512..239T, lire en ligne)
(en) Ece Alat, Arthur T. Mottaa, Robert J. Comstock, Jonna M. Partezana et Douglas E. Wolfe, « Multilayer (TiN, TiAlN) ceramic coatings for nuclear fuel cladding », Journal of Nuclear Materials, vol. 478, , p. 236-244 (DOI10.1016/j.jnucmat.2016.05.021, Bibcode2016JNuM..478..236A, lire en ligne)
harvard.edu
ui.adsabs.harvard.edu
(en) D. S. Stone, K. B. Yoder et W. D. Sproul, « Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation », Journal of Vacuum Science & Technology A, vol. 9, no 4, , p. 2543-2547 (DOI10.1116/1.577270, Bibcode1991JVST....9.2543S, lire en ligne)
(en) W. Spengler, R. Kaiser, A. N. Christensen et G. Müller-Vogt, « Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN », Physical Review B, vol. 17, no 3, , p. 1095-1101 (DOI10.1103/PhysRevB.17.1095, Bibcode1978PhRvB..17.1095S, lire en ligne)
(en) Valerii M. Vinokur, Tatyana I. Baturina, Mikhail V. Fistul, Aleksey Yu. Mironov, Mikhail R. Baklanov et Christoph Strunk, « Superinsulator and quantum synchronization », Nature, vol. 452, no 7187, , p. 613-615 (PMID18385735, DOI10.1038/nature06837, Bibcode2008Natur.452..613V, lire en ligne)
(en) Thaddeus G. Dziura, Benjamin Bunday, Casey Smith, Muhammad M. Hussain, Rusty Harris, Xiafang Zhang et Jimmy M. Price, « Measurement of high-k and metal film thickness on FinFET sidewalls using scatterometry », Metrology, Inspection, and Process Control for Microlithography XXII. Edited by John A. Allgair, Christopher J. Raymond, Proceedings of the SPIE, vol. 6922, , article no 69220V (DOI10.1117/12.773593, Bibcode2008SPIE.6922E..29D, lire en ligne)
(en) Matheus A. Tunes, Felipe C. da Silva, Osmane Camara, Claudio G. Schön, Julio C. Sagás, Luis C. Fontana, Stephen E. Donnelly, Graeme Greaves et Philip D. Edmondson, « Energetic particle irradiation study of TiN coatings: are these films appropriate for accident tolerant fuels? », Journal of Nuclear Materials, vol. 512, , p. 239-245 (DOI10.1016/j.jnucmat.2018.10.013, Bibcode2018JNuM..512..239T, lire en ligne)
(en) Ece Alat, Arthur T. Mottaa, Robert J. Comstock, Jonna M. Partezana et Douglas E. Wolfe, « Multilayer (TiN, TiAlN) ceramic coatings for nuclear fuel cladding », Journal of Nuclear Materials, vol. 478, , p. 236-244 (DOI10.1016/j.jnucmat.2016.05.021, Bibcode2016JNuM..478..236A, lire en ligne)
jst.go.jp
jstage.jst.go.jp
(en) Keizo Uematsu, Nobuo Kieda, Osamu Sakurai, Nobuyasu Mizutani et Masanori Kato, « Effect of Non-stoichiometry on the Sintering of TiNx », Journal of the Ceramic Association, Japan, vol. 90, no 1046, , p. 597-603 (DOI10.2109/jcersj1950.90.1046_597, lire en ligne)
nature.com
(en) Valerii M. Vinokur, Tatyana I. Baturina, Mikhail V. Fistul, Aleksey Yu. Mironov, Mikhail R. Baklanov et Christoph Strunk, « Superinsulator and quantum synchronization », Nature, vol. 452, no 7187, , p. 613-615 (PMID18385735, DOI10.1038/nature06837, Bibcode2008Natur.452..613V, lire en ligne)
nih.gov
ncbi.nlm.nih.gov
(en) Valerii M. Vinokur, Tatyana I. Baturina, Mikhail V. Fistul, Aleksey Yu. Mironov, Mikhail R. Baklanov et Christoph Strunk, « Superinsulator and quantum synchronization », Nature, vol. 452, no 7187, , p. 613-615 (PMID18385735, DOI10.1038/nature06837, Bibcode2008Natur.452..613V, lire en ligne)
(en) Hugo Hämmerle, Karin Kobuch, Konrad Kohler, Wilfried Nisch, Helmut Sachs et Martin Stelzle, « Biostability of micro-photodiode arrays for subretinal implantation », Biomaterials, vol. 23, no 3, , p. 797-804 (PMID11771699, DOI10.1016/S0142-9612(01)00185-5, lire en ligne)
sciencedirect.com
(en) G. Abadias, « Stress and preferred orientation in nitride-based PVD coatings », Surface and Coatings Technology, vol. 202, no 11, , p. 2223-2235 (DOI10.1016/j.surfcoat.2007.08.029, lire en ligne)
(en) M.Birkholz, K.-E. Ehwald, D. Wolansky, I. Costina, C. Baristiran-Kaynak, M. Fröhlich, H. Beyer, A. Kapp et F. Lisdat, « Corrosion-resistant metal layers from a CMOS process for bioelectronic applications », Surface and Coatings Technology, vol. 204, nos 12-13, , p. 2055-2059 (DOI10.1016/j.surfcoat.2009.09.075, lire en ligne)
(en) Hugo Hämmerle, Karin Kobuch, Konrad Kohler, Wilfried Nisch, Helmut Sachs et Martin Stelzle, « Biostability of micro-photodiode arrays for subretinal implantation », Biomaterials, vol. 23, no 3, , p. 797-804 (PMID11771699, DOI10.1016/S0142-9612(01)00185-5, lire en ligne)
(en) Matheus A. Tunes, Felipe C. da Silva, Osmane Camara, Claudio G. Schön, Julio C. Sagás, Luis C. Fontana, Stephen E. Donnelly, Graeme Greaves et Philip D. Edmondson, « Energetic particle irradiation study of TiN coatings: are these films appropriate for accident tolerant fuels? », Journal of Nuclear Materials, vol. 512, , p. 239-245 (DOI10.1016/j.jnucmat.2018.10.013, Bibcode2018JNuM..512..239T, lire en ligne)
(en) Ece Alat, Arthur T. Mottaa, Robert J. Comstock, Jonna M. Partezana et Douglas E. Wolfe, « Multilayer (TiN, TiAlN) ceramic coatings for nuclear fuel cladding », Journal of Nuclear Materials, vol. 478, , p. 236-244 (DOI10.1016/j.jnucmat.2016.05.021, Bibcode2016JNuM..478..236A, lire en ligne)
scitation.org
avs.scitation.org
(en) D. S. Stone, K. B. Yoder et W. D. Sproul, « Hardness and elastic modulus of TiN based on continuous indentation technique and new correlation », Journal of Vacuum Science & Technology A, vol. 9, no 4, , p. 2543-2547 (DOI10.1116/1.577270, Bibcode1991JVST....9.2543S, lire en ligne)
(en) Thaddeus G. Dziura, Benjamin Bunday, Casey Smith, Muhammad M. Hussain, Rusty Harris, Xiafang Zhang et Jimmy M. Price, « Measurement of high-k and metal film thickness on FinFET sidewalls using scatterometry », Metrology, Inspection, and Process Control for Microlithography XXII. Edited by John A. Allgair, Christopher J. Raymond, Proceedings of the SPIE, vol. 6922, , article no 69220V (DOI10.1117/12.773593, Bibcode2008SPIE.6922E..29D, lire en ligne)
wiley.com
onlinelibrary.wiley.com
(en) M. Birkholz, K.‐E. Ehwald, P. Kulse, J. Drews, M. Fröhlich, U. Haak, M. Kaynak, E. Matthus, K. Schulz et D. Wolansky, « Ultrathin TiN Membranes as a Technology Platform for CMOS‐Integrated MEMS and BioMEMS Devices », Advanced Functional Materials, vol. 21, no 9, , p. 1652-1656 (DOI10.1002/adfm.201002062, lire en ligne)