P. Sigmund, Nucl. Instrum. Methods Phys. Res. B (1987). "Mechanisms and theory of physical sputtering by particle impact". Nuclear Instruments and Methods in Physics Research Section B. 27 (1): 1–20. Bibcode:1987NIMPB..27....1S. doi:10.1016/0168-583X(87)90004-8.
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P. Sigmund, Nucl. Instrum. Methods Phys. Res. B (1987). "Mechanisms and theory of physical sputtering by particle impact". Nuclear Instruments and Methods in Physics Research Section B. 27 (1): 1–20. Bibcode:1987NIMPB..27....1S. doi:10.1016/0168-583X(87)90004-8.
