Atomi rétegleválasztás (Hungarian Wikipedia)

Analysis of information sources in references of the Wikipedia article "Atomi rétegleválasztás" in Hungarian language version.

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aip.org

scitation.aip.org

Puurunen, Riikka L. (2005. június 15.). „Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process”. Journal of Applied Physics 97 (12), 121301. o. DOI:10.1063/1.1940727. ISSN 0021-8979.

archive.org

(2010) „Atomic Layer Deposition: An Overview”. Chem. Rev. 110, 111–131. o. DOI:10.1021/cr900056b.

doi.org

dx.doi.org

Puurunen, Riikka L. (2005. június 15.). „Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process”. Journal of Applied Physics 97 (12), 121301. o. DOI:10.1063/1.1940727. ISSN 0021-8979.
(2010) „Atomic Layer Deposition: An Overview”. Chem. Rev. 110, 111–131. o. DOI:10.1021/cr900056b.

qmul.ac.uk

chem.qmul.ac.uk

2.3 Adsorption Kinetics - The Rate of Adsorption. www.chem.qmul.ac.uk

svta.com

Molecular Beam Epitaxy & Atomic Layer Deposition Systems - SVT Associates. www.svta.com

worldcat.org

Puurunen, Riikka L. (2005. június 15.). „Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process”. Journal of Applied Physics 97 (12), 121301. o. DOI:10.1063/1.1940727. ISSN 0021-8979.

youtube.com

"How Atomic Layer Deposition Works" Applied Materials. https://www.youtube.com/watch?v=KOEsgZU1sts