Shareef, I. A.; Rubloff, G. W.; Anderle, M.; Gill, W. N.; Cotte, J.; Kim, D. H. (1995-07-01). "Subatmospheric chemical vapor deposition ozone/TEOS process for SiO2 trench filling". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. 13 (4): 1888–1892. Bibcode:1995JVSTB..13.1888S. doi:10.1116/1.587830. ISSN1071-1023.
Gleason, Karen; Ayse Asatekin; Miles C. Barr; Samaan H. Baxamusa; Kenneth K.S. Lau; Wyatt Tenhaeff; Jingjing Xu (May 2010). "Designing polymer surfaces via vapor deposition". Materials Today. 13 (5): 26–33. doi:10.1016/S1369-7021(10)70081-X.
Gleason, Karen; Ayse Asatekin; Miles C. Barr; Samaan H. Baxamusa; Kenneth K.S. Lau; Wyatt Tenhaeff; Jingjing Xu (May 2010). "Designing polymer surfaces via vapor deposition". Materials Today. 13 (5): 26–33. doi:10.1016/S1369-7021(10)70081-X.
Shareef, I. A.; Rubloff, G. W.; Anderle, M.; Gill, W. N.; Cotte, J.; Kim, D. H. (1995-07-01). "Subatmospheric chemical vapor deposition ozone/TEOS process for SiO2 trench filling". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. 13 (4): 1888–1892. Bibcode:1995JVSTB..13.1888S. doi:10.1116/1.587830. ISSN1071-1023.
Shareef, I. A.; Rubloff, G. W.; Anderle, M.; Gill, W. N.; Cotte, J.; Kim, D. H. (1995-07-01). "Subatmospheric chemical vapor deposition ozone/TEOS process for SiO2 trench filling". Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. 13 (4): 1888–1892. Bibcode:1995JVSTB..13.1888S. doi:10.1116/1.587830. ISSN1071-1023.