エッチング (微細加工) (Japanese Wikipedia)

Analysis of information sources in references of the Wikipedia article "エッチング (微細加工)" in Japanese language version.

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Finne, R.M.; Klein, D.L. (1967). “A Water-Amine-Complexing Agent System for Etching Silicon”. Journal of the Electrochemical Society 114 (9): 965–70. doi:10.1149/1.2426793.
Shikida, M.; Sato, K.; Tokoro, K.; Uchikawa, D. (2000). “Surface morphology of anisotropically etched single-crystal silicon”. Journal of Micromechanics and Microengineering 10 (4): 522. doi:10.1088/0960-1317/10/4/306.