原子層エッチング (Japanese Wikipedia)

Analysis of information sources in references of the Wikipedia article "原子層エッチング" in Japanese language version.

refsWebsite

Global rank Japanese rank

2^nd place

6^th place

1,725^th place

2,169^th place

low place

low place

222^nd place

498^th place

5^th place

19^th place

doi.org

Oehrlein, G. S. (2015-03-27). “Atomic Layer Etching at the Tipping Point: An Overview” (英語). ECS J. Solid State Sci. Technol 4: N5041-N5053. doi:10.1149/2.0061506jss.
Puurunen, Riikka L. (2014-12-01). “A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy” (英語). Chemical Vapor Deposition 20 (10-11-12): 332–344. doi:10.1002/cvde.201402012. ISSN 1521-3862.

iop.org

iopscience.iop.org

Oehrlein, G. S. (2015-03-27). “Atomic Layer Etching at the Tipping Point: An Overview” (英語). ECS J. Solid State Sci. Technol 4: N5041-N5053. doi:10.1149/2.0061506jss.

semimd.com

“Atomic Layer Etch now in Fab Evaluations”. 2014年8月4日閲覧。

wiley.com

onlinelibrary.wiley.com

Puurunen, Riikka L. (2014-12-01). “A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy” (英語). Chemical Vapor Deposition 20 (10-11-12): 332–344. doi:10.1002/cvde.201402012. ISSN 1521-3862.

worldcat.org

search.worldcat.org

Puurunen, Riikka L. (2014-12-01). “A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy” (英語). Chemical Vapor Deposition 20 (10-11-12): 332–344. doi:10.1002/cvde.201402012. ISSN 1521-3862.