Table III, V. Miikkulainen (2013). "Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends". Journal of Applied Physics113 (2): 021301–021301–101. doi:10.1063/1.4757907. Bibcode: 2013JAP...113b1301M.
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H. Zhu; C. Tang; L. R. C. Fonseca; R. Ramprasad (2012). "Recent progress in ab initio simulations of hafnia-based gate stacks". Journal of Materials Science47 (21): 7399–7416. doi:10.1007/s10853-012-6568-y. Bibcode: 2012JMatS..47.7399Z.
Wilk G. D., Wallace R. M., Anthony J. M. (2001). "High-κ gate dielectrics: Current status and materials properties considerations". Journal of Applied Physics89 (10): 5243–5275. doi:10.1063/1.1361065. Bibcode: 2001JAP....89.5243W., Table 1
K.-L. Lin (2011). "Electrode dependence of filament formation in HfO2 resistive-switching memory". Journal of Applied Physics109 (8): 084104–084104–7. doi:10.1063/1.3567915. Bibcode: 2011JAP...109h4104L.
Table III, V. Miikkulainen (2013). "Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends". Journal of Applied Physics113 (2): 021301–021301–101. doi:10.1063/1.4757907. Bibcode: 2013JAP...113b1301M.
H. Zhu; C. Tang; L. R. C. Fonseca; R. Ramprasad (2012). "Recent progress in ab initio simulations of hafnia-based gate stacks". Journal of Materials Science47 (21): 7399–7416. doi:10.1007/s10853-012-6568-y. Bibcode: 2012JMatS..47.7399Z.
Wilk G. D., Wallace R. M., Anthony J. M. (2001). "High-κ gate dielectrics: Current status and materials properties considerations". Journal of Applied Physics89 (10): 5243–5275. doi:10.1063/1.1361065. Bibcode: 2001JAP....89.5243W., Table 1
K.-L. Lin (2011). "Electrode dependence of filament formation in HfO2 resistive-switching memory". Journal of Applied Physics109 (8): 084104–084104–7. doi:10.1063/1.3567915. Bibcode: 2011JAP...109h4104L.