நுண்ணிய தொழினுட்பம் (Tamil Wikipedia)

Analysis of information sources in references of the Wikipedia article "நுண்ணிய தொழினுட்பம்" in Tamil language version.

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archive.org

James B. Angell; Stephen C. Terry; Phillip W. Barth (April 1983). "Silicon Micromechanical Devices". Scientific American 248 (4): 44–55. https://archive.org/details/sim_scientific-american_1983-04_248_4/page/44.
R. Ghodssi; P. Lin (2011). MEMS Materials and Processes Handbook. Berlin: Springer. பன்னாட்டுத் தரப்புத்தக எண் 978-0-387-47316-1.

doi.org

dx.doi.org

Wilfinger, R.J.; Bardell, P.H.; Chhabra, D.S. (1968). "The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate". IBM J. 12: 113–8. doi:10.1147/rd.121.0113.

google.com

Electromechanical monolithic resonator, U.S. patent 3614677 பரணிடப்பட்டது 2020-02-07 at the வந்தவழி இயந்திரம், Filed April 29, 1966; Issued October 1971

scitation.org

aip.scitation.org

"A Resonant-Gate Silicon Surface Transistor with High-Q Band-Pass Properties". Applied Physics Letters. 15 August 1965. பார்க்கப்பட்ட நாள் 25 December 2010.

web.archive.org

Electromechanical monolithic resonator, U.S. patent 3614677 பரணிடப்பட்டது 2020-02-07 at the வந்தவழி இயந்திரம், Filed April 29, 1966; Issued October 1971