Shun'ko, Evgeny V.; Stevenson, David E.; Belkin, Veniamin S. Inductively Coupling Plasma Reactor With Plasma Electron Energy Controllable in the Range From ~6 to ~100 eV. IEEE Transactions on Plasma Science. 2014, 42 (3): 774–785. ISSN 0093-3813. doi:10.1109/TPS.2014.2299954.
Shun'ko, Evgeny V.; Stevenson, David E.; Belkin, Veniamin S. Inductively Coupling Plasma Reactor With Plasma Electron Energy Controllable in the Range From ~6 to ~100 eV. IEEE Transactions on Plasma Science. 2014, 42 (3): 774–785. ISSN 0093-3813. doi:10.1109/TPS.2014.2299954.