Planar process (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Planar process" in English language version.

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books.google.com

Bassett, Ross Knox (2007). To the Digital Age: Research Labs, Start-up Companies, and the Rise of MOS Technology. Johns Hopkins University Press. p. 46. ISBN 9780801886393.

computerhistory.org

"1959: Practical Monolithic Integrated Circuit Concept Patented". Computer History Museum. Retrieved 13 August 2019.

dejazzer.com

Sah, Chih-Tang (October 1988). "Evolution of the MOS transistor-from conception to VLSI" (PDF). Proceedings of the IEEE. 76 (10): 1280–1326 (1291). Bibcode:1988IEEEP..76.1280S. doi:10.1109/5.16328. ISSN 0018-9219.

doi.org

Butterfield, Andrew J.; Szymanski, John, eds. (2018). A Dictionary of Electronics and Electrical Engineering. Vol. 1. Oxford University Press. doi:10.1093/acref/9780198725725.001.0001. ISBN 978-0-19-872572-5.
Sah, Chih-Tang (October 1988). "Evolution of the MOS transistor-from conception to VLSI" (PDF). Proceedings of the IEEE. 76 (10): 1280–1326 (1291). Bibcode:1988IEEEP..76.1280S. doi:10.1109/5.16328. ISSN 0018-9219.

espacenet.com

worldwide.espacenet.com

US 3025589 Hoerni, J. A.: "Method of Manufacturing Semiconductor Devices” filed May 1, 1959
US 3064167 Hoerni, J. A.: "Semiconductor device" filed May 15, 1960

harvard.edu

ui.adsabs.harvard.edu

Sah, Chih-Tang (October 1988). "Evolution of the MOS transistor-from conception to VLSI" (PDF). Proceedings of the IEEE. 76 (10): 1280–1326 (1291). Bibcode:1988IEEEP..76.1280S. doi:10.1109/5.16328. ISSN 0018-9219.

nasa.gov

hq.nasa.gov

"Integrated circuits". NASA. Retrieved 13 August 2019.

nist.gov

Shannon Hill. "UV Lithography: Taking Extreme Measures". National Institute of Standards and Technology (NIST).

oxfordreference.com

Butterfield, Andrew J.; Szymanski, John, eds. (2018). A Dictionary of Electronics and Electrical Engineering. Vol. 1. Oxford University Press. doi:10.1093/acref/9780198725725.001.0001. ISBN 978-0-19-872572-5.

worldcat.org

Sah, Chih-Tang (October 1988). "Evolution of the MOS transistor-from conception to VLSI" (PDF). Proceedings of the IEEE. 76 (10): 1280–1326 (1291). Bibcode:1988IEEEP..76.1280S. doi:10.1109/5.16328. ISSN 0018-9219.