Tungsten hexafluoride (English Wikipedia)

Analysis of information sources in references of the Wikipedia article "Tungsten hexafluoride" in English language version.

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  • US patent 6544889, "Method for tungsten chemical vapor deposition on a semiconductor substrate", issued 2003-04-08 

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pubchem.ncbi.nlm.nih.gov

  • "Tungsten hexafluoride". pubchem.ncbi.nlm.nih.gov.

pubmed.ncbi.nlm.nih.gov

  • Benjamin, Sophie L.; Levason, William; Reid, Gillian (2013). "Medium and high oxidation state metal/Non-metal fluoride and oxide–fluoride complexes with neutral donor ligands". Chem. Soc. Rev. 42 (4): 1460–1499. doi:10.1039/C2CS35263J. PMID 23014811.

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